WSDC

Preliminary Information

Introduction

The following information refers to PVD1, 2, 3, 4, 5, 6, 7, LAM1 and PVDSC1 and 2. {|class="wikitable" border="1" cellpadding="2" cellspacing="2" !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Equipment
Name !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|MESA ID !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|HGST Part#
or License Plate !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Match MESA?
(Y/N) !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Confirmed
(Person) !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Date !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Manufacturer !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|MFG Model# |- |PVD1||PVD1||52105||Yes||RES|| 4/7/2015||CVC / Veeco||CX7 |- |PVD2||PVD2||52132||Yes||RES||4/7/2015||CVC / Veeco||CX7 |- |PVD3||PVD3||52199||Yes||RES||4/7/2015||CVC / Veeco||CX7 |- |PVD4||PVD4||53022||Yes||RES||4/7/2015||CVC / Veeco||CX7 |- |PVD5||PVD5||53024||Yes||RES||4/7/2015||CVC / Veeco||CX7 |- |PVD6||PVD006
PVD6-TM
PVD6-PM1
PVD6-PM2
PVD6-PM4
PVD6-PM5||53022
53022
53426
53427
53029
53029||Duplicate of TM
Yes
Yes
Yes
Yes
Located on PM4||BDR
BDR
RES
RES
BDR
BDR||4/7/2015
5/7/2015
4/7/2015
4/7/2015
5/7/2015
5/7/2015||CVC / Veeco||CX7 |- |PVD7||PVD7-TM
PVD7-PM1
PVD7-PM2
PVD7-PM4
PVD7-PM5||54160
54161
54162
54163
54164||Yes
Yes
Yes
Yes
Yes||RES
RES
RES
RES
RES||4/7/2015
4/7/2015
4/7/2015
4/7/2015
4/7/2015||CVC / Veeco||CX7 |- |LAM001||LAM001||53288||Yes||RES||4/7/2015||CVC / Veeco||CX7 |- |PVDSC1||PVDSC1-TM
PVDSC1-PM1
PVDSC1-PM2
PVDSC1-PM3
PVDSC1-PM4
PVDSC1-PM5
PVDSC1-PM6||53182
53183
53185
53409
53410
53411
53412||Yes
Yes
Yes
Yes
Yes
Yes
Yes||RES
RES
RES
RES
RES
RES
RES||4/7/2015
4/7/2015
4/7/2015
4/7/2015
4/7/2015
4/7/2015
4/7/2015||CVC / Veeco||CX8700 |- |PVDSC2||PVDSC2-TM
PVDSC2-PM1
PVDSC2-PM2
PVDSC2-PM3
PVDSC2-PM4
PVDSC2-PM5
PVDSC2-PM6||53415
53416
53417
53418
53419
53420
53421||Yes
Yes
Yes
Yes
Yes
Yes
Yes||RES
BDR
BDR
RES
RES
BDR
BDR||4/7/2015
5/7/2015
5/7/2015
4/7/2015
4/7/2015
5/7/2015
5/7/2015||CVC / Veeco||CX8700 |} The CVC PVD Combination sputtering system is used to manufacture the read sensor at the wafer level. The current cluster configuration is composed of two loadlocks, two process modules, an etch module, an aligner and a robot. The two Process Modules (PM) are CVC magnetron-sputtering systems, while the last PM is a CVC Etch module. Both the PVD modules are capable of RF sputtering, but they are currently set up to only run DC Sputtering. Note that PVD1 and PVD2 have only one cryogenic pump per GMR module. PVDs: 3, 4, 5, 6, 7 and LAM1 have 2 cryo pumps per GMR module. The two PVD modules on the Combination system have a one-target DC magnetron sputtering module and a six-target magnetron DC sputtering module (PVD6 or GMR). The basic mechanism for sputtering between the one-target and the six-target PVD system is very similar. In a common process, the wafer is loaded on a stationary stage underneath a target. The stage will then move up to its sputtering height. Argon is introduced to the system and a plasma is ignited(with an igniter or putting a high bias on the stage or target). At the same time, the Magnetron on top of the target will rotate. The purpose is to optimize target usage, increased TS (target-substrate) distance, and improved uniformity. The target is, then, biased and a pre-clean (target conditioning step to minimized film contamination) of the target occurs. At this time, the shutter is kept closed to prevent pre-cleaned material to be sputtering onto the substrate. After finishing target pre-clean, the shutter will open and the deposition occurs. The purpose of this document is used in association with CVC instruction manual, CVC PVD electrical and mechanical schematic, maintenance manuals for Brooks Aligner, CX-7000 robot, P:\CVC folder in the network, and VCE-4/VCE-6 cassette elevators, CSC instruction manual, and CSC MMM (23H2231) to troubleshoot and repair the combination tool. '''References''' Brooks manuals for CX-7/8 robot.
CX-7/ CVC Connexion Cluster Tool Instructional Manual.
CVC mechanical and electrical schematics.
Brooks Mag robot electrical and mechanical schematics.
X:\Equip Team\Maintenance\Vacuum Tools\PVD ADD PVDi PVDSC PM\CVC PVD Reference Only Procedure.
This will provide information for maintenance procedures and schematics of the tool.

Safety

Safety Instructions and Procedures

Before performing maintenance on any plumbing, depressurize the appropriate input services by shutting off the main valve in the core area. Protective clothing, goggles, shoes, and other safety equipment must be used when specified by your department. You must know the location of the EMERGENCY POWER OFF switch (EPO) and the nearest fire extinguishers. All guards and shield must be on mechanical equipment when these machines are in operation. Observe all safety regulations as outlined in the HGSTGST Safety and Health manual. For safety reasons, service work is to be performed by two people. If one person is working on a system alone, a second person must be close by, as there may be high voltages present and mechanical mechanisms that could present a hazard to a person working alone. Some procedures and checkouts require TWO people. Some procedures and operations require lifting of parts or movement in restricted / confined space.
You must be familiar with:
LP04 (Safety & Health Local Practice 04 – Equipment Servicing Safe Work Practices)
LP29 (Safety & Health Local Practice 29 – Manual Materials Handling)
High Pressure Gas Cylinders are used on this equipment. You must be familiar with:
LP21 (Safety & Health Local Practice 21 - Compressed Gas Safety)
All LP (Local Practice) for San Jose Site Operations – HGST San Jose Safety & Health Training - Operating Procedures (formerly Local Practices), Work Instructions and Instructional Material’s see HGST SPARK. https://hgst.jiveon.com/community/real-estate-and-site-operations/americas-reso
Electrical shock and mechanical injury can be intensified by jewelry. Inadequate guarding and interlocks can result in serious injury or death. Do not attempt to extinguish the fire yourself unless you have been trained in the proper use of the fire extinguishing equipment and the fire is small. Do NOT attempt to clean up the spill alone. Chemical vapors and contact can result in respiratory illness and skin irritation. Touching a shock victim can result in electrocution. Chemical vapors and lack of oxygen can result in death For safety reasons, service work is to be performed by two people. If one person is working on a system alone, a second person must be close by, as there may be high voltages present and mechanical mechanisms that could present a hazard to a person working alone. Some procedures and checkouts require TWO people. Whenever possible, power should be removed from the system when making repairs or when maintenance work is being performed. Use particular caution when working around RF generators and circuits. Ground out all de-energized components before making personal contact.

Safety Equipment

:N/A

Cautions and Warnings

Key Safety Words Exposures that may result in amputation, disfigurement, permanent disability or death. Exposures that may result in injury or illness of a non-disabling type. Exposures that may result in non-injury or nuisance condition. Computerized equipment that is connected to a host network can be controlled remotely by other computers on the network. To prevent injury from unexpected remote activation, the network connection must be disconnected when performing power on troubleshooting and/or adjustments.
No one may remotely operate a tool without first notifying the local personnel performed service. All participants must be in clear view of the tool's operator or in positive communication with one another.

General Safety Information

  • Before performing maintenance on any plumbing, depressurize the appropriate input services by shutting off the main valve in the core area.
  • Protective clothing, goggles, shoes, and other safety equipment must be used when specified by your department.
  • You must know the location of the EMERGENCY POWER OFF switch (EPO) and the nearest fire extinguishers.
  • All guards and shield must be on mechanical equipment when these machines are in operation.
  • Observe all safety regulations as outlined in the HGSTGST Safety and Health manual.
  • An individual must never work on any equipment on which they have not been trained and the training documented.
  • Ornamental jewelry (watches, rings, necklaces, and so on) will not be worn when working on equipment in the disk area.
Electrical shock and mechanical injury can be intensified by jewelry.
  • Know the location of the nearest eyewash fountain and shower. Understand the operation of these.
  • Know the evacuation route from the area and the meeting place of your department.
  • Never under any circumstances put your hand inside of the machine while it is in operation. Observe any troubleshoot, only when necessary, with the power '''ON''' and repair, clean and inspect with the power '''OFF'''.
  • All safety covers, machine covers, guards, and interlock devices will be replaced and in working order when maintenance has completed work on the machine. This applies even if the covers were missing or the interlocks inoperable when maintenance started working on the machine.
Inadequate guarding and interlocks can result in serious injury or death.
  • Follow Lockout/Blockout/Tagout procedures any time that cleaning, inspection or repairs are needed. This includes preventive maintenance activities.
  • Understand the MSDS for each chemical used in the operation of this machine or required for a maintenance activity.
  • Wear chemical monogoggles for eye protection from chemicals and dust when needed.
  • Safety shoed must be worn at all times when working in the head area.
  • Air blow off nozzles shall never be connected to a supply pressure greater than 30 psig.
  • Never work alone where you cannot be heard or seen by a qualified person.
  • Loose clothes, long sleeves, neckties, and so on must not be worn when working with this equipment.
  • Know the location of the nearest fire extinguisher and area (EPO).
  • In case of fire in the area immediately notify security on the Emergency telephone number and the department technician.
  • Do not attempt to extinguish the fire yourself unless you have been trained in the proper use of the fire extinguishing equipment and the fire are small.
  • Safety glasses must be worn when working on live electrical circuits and when particles can be thrown into the eyes.
  • In case of chemical spill notify security on 9911 and the department technician. '''Do NOT''' attempt to clean up the spill yourself.
Chemical vapors and contact can result in respiratory illness and skin irritation.
  • In case of electrical shock avoid contact with the victim unless power can be turned off and verified off.
Touching a shock victim can result in electrocution.
  • Do not enter designated confined spaces unless you have a permit to do so. All designated confined spaces are marked with an appropriate sign.
Chemical vapors and lack of oxygen can result in death.
  • Any known unsafe condition must be brought to the attention of the department manager.
For safety reasons, service work is to be performed by two people. If one person is working on a system alone, a second person must be close by, as there may be high voltages present and mechanical mechanisms that could present a hazard to a person working alone. Some persons and checkouts require TWO people. Whenever possible, power should be removed from the system when making repairs or when maintenance work is being performed. Use particular caution when working around RF generators and circuits. Ground out all de-energized components before making personal contact.

Chemical Safety

Emergency Showers and Eyewash Equipment

All employees must know the location of how to use the nearest eyewash fountain and emergency shower. Emergency procedures are as follows:
  1. Eyewash Fountain:
    1. Hold your eyes open and flush for 15 minutes with water.
    2. Go to the medical department.
  2. Emergency Shower:
    1. Immediately get into the shower.
    2. Remove all contaminated clothing
    3. Flush with water for 15 minutes
    4. Go to the medical department.

Loose Clothing and Jewelry

Finger cots are permissible on disk wheel operations such as buffing, polishing, and so on.

Working Alone

Safety Rules for Prevention of Accidents While Carrying Out Repairs (According to VDE 0105, Part 1/7.83, paragraph 7)*

Lockout / Blockout / Tagout

Safety (Lock out tag out) & Live servicing operation can be done only by certified person.

Lockout/ Tagout Procedure

  1. Determine the location of the Primary power Disconnect for the electrical power supplied to the equipment.
  2. Turn off the primary power by pulling the disconnect.
  3. Attach a '''"DO NOT OPERATE - THIS EQUIPMENT IS BEING SERVICED" warning tag''' to the Primary Power Disconnect Handle and sign the tag. Note on the tag the reason for the lockout, your name, date, time and how to reach you.
  4. Test to ensure that the power is OFF. Make sure that the equipment is clear. Notify any personnel in the immediate area that you are going to test for equipment movement. Press the Start button and verify that nothing is ON or operating.

Pneumatic Lockout/Blockout Procedure

  1. Determine the location of the Primary Air Disconnect for the pneumatic power supplied to the equipment.
  2. Turn off the primary air by turning the valve off.
  3. Attach a '''"DO NOT OPERATE – DANGER, MY LIFE IS ON THE LINE"''' warning tag to the Primary Air Disconnect Handle and sign the tag. Note on the tag the reason for the lockout, your name, date, time and how to reach you.
  4. Test to ensure that the air is '''OFF'''. Make sure that the equipment is clear. Notify any Personnel in the immediate area that you are going to test for equipment movement. Press the start button and verify that nothing is '''ON '''or operating.
  5. If the equipment is not equipped with a dump valve the air must be bled from the system. Make sure that the pressure gauges return to zero and the pneumatic assemblies can be moved by hand.
  6. Ensure that all assemblies that are suspended with pneumatic pressure are blocked.

Materials

Chemicals

:{|class="wikitable" border="1" cellpadding="2" cellspacing="2" !width="260" style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Chemical Name !width="300" style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|HGSTGST Chemical Part Number |- |IPA||align = "center"|910-143-072 100% isopropyl alcohol |- |Argon UHP (process gas)||align = "center"|921-180-010 MSDS 50008 |- |H2N2 (process gas)||align = "center"|920-015-340 MSDS 50089 |- |N2||align = "center"|921-070-060 MSDS P-4631-G |} Refer to SPARK Chem Tool, see https: [//hgst.chemicalsafety.com/HGST/ //hgst.chemicalsafety.com/HGST/ ]
Hard copies are also controlled in Chemical Books in mfg.

Materials

:{|class="wikitable" border="1" cellpadding="2" cellspacing="2" !width="260" style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Consumables !width="300" style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|HGST Consumables Part Number |- |Scotch Brite Pad (Medium)||align = "center"|1006484 |- |Clean Room Wipes||align = "center"|  |- |Wire Brush, 3" Dia.||align = "center"|9656521 |- |Sputter TARGETS, varies by tool:
FeCo25, FeCo30, Ru, NiFe20,
NiCr20, FeCo30Ni5, Cr, FeNi45,
NiFe18.8,Cu, Au, Ir, CrSiO, Ta, |valign = "top"|Refer to the WEBTRS for further information. |}

Process Gas Bottle identification

All Praxair gas cylinders have a small label affixed contains information regarding the contented of the cylinder.
The label contains the following information:
HXXXYZZZAAABBB
H
Gas type (H for Helium, N for Nitrogen, O for Oxygen, A for Argon and so on…no letter might indicates a mixture of gases)
XXX
location code – for example186 Pittsburg CA
Y
End of year when gas cylinder filled – for example 4 indicates 2004, 3 indicates 2003 and so on…
AAA
Julian date, number of the day in that year when the cylinder was filled – can be from 001 which refers to January 1 to 365 which refers to December 31 ( I am sorry I forgot to ask about a leap year but I assume it will be 366).
BBB
Numerical sequence, which means when in the day the cylinder was filled or at what sequence of the day the cylinder was filled.
The label also contains information to the volume of gas that the cylinder was filled and during the first few months of 2004 the label also contains the gas name. Example: [[Image:52132-AE(English)_127.png|thumb|none|480px|Figure 1: Example of Argon Bottle ID Tag]] [[Image:52132-AE(English)_128.png|thumb|none|480px|Figure 2: Example of Helium Bottle ID Tag]]

Gas Cylinder Verification

'''Procedure:'''
  1. Remove the full tab on the card (see Figure 3). IN USE tab should be showing.
  2. Sign and date the card.
  3. Copy the gas cylinder ID number (see Figure 4) from the small white sticker on the bottle to the card.
  4. The numbers on the card and the bottle should match. Verify that the gas identified in the cylinder ID number matches the gas labeled on the bottle.
  5. Return the card to the sleeve located on the new gas cylinder.
  6. Replace the cap onto the empty gas cylinder
  7. Tear the "IN USE" tag and place the chemical control tag into the empty cylinder. The chemical control tag should only have EMPTY visible.
  8. In Lotus Notes, log the gas cylinder change for that tool. Be sure to include the gas cylinder ID number(see Figure 4) in the note for further reference.'''
If after installing the new gas bottle, and the gas line will not pump down, clearly mark the chemical control tag "Defective CGA, Please send back". This will ensure we do not get charged for a defective gas cylinder. {|width="780" |[[Image:52132-AE(English)_129.jpg|thumb|none|180px|Figure 3: Chemical Control Tag]] |valign="top"|[[Image:52132-AE(English)_130.jpg|thumb|none|360px|Figure 4: Gas cylinder ID Number]] |}

Cautions and Warnings

This equipment contains strong Magnetic material. Observe safety precautions when working on or near equipment.

Equipment

Equipment Used in the Process.

Equipment Used in the Process

Refer to Slider/Fab Maintenance for the current Tool List Report, which shows the License Plate Numbers for this group of tools.

Cautions and Warnings

:N/A

Reference

As referred to in Section 1.1 Introduction. Brooks manuals for CX-7/8 robot. CX-7/ CVC Connexion Cluster Tool Instructional Manual CVC mechanical and electrical schematics 8 robot electrical and mechanical schematics Brooks P:\CVC folder in the network. This will provide information for maintenance procedures and schematics of the tool

HGST reference documents

{|border="0" cellspacing="2" |FV Laminate |MPI 037-001 |- |LAM / PVD |MPI 037-259 |- |WEBSPC |MRM 037-258 |}

Training

Courses Required

For a list of classes Operating Procedures (formerly Local Practices), training information etc. reside: For San Jose Site Operations – HGST San Jose Safety & Health Training - Operating Procedures (formerly Local Practices), Work Instructions and Instructional Material’s see HGST SPARK. https://hgst.jiveon.com/community/real-estate-and-site-operations/americas-reso

General Tool Information

General Tool Description

The PVD system consists of a CX-7 type arrangement with a single target PVD, a GMR module and several cabinets. The Single target PVD tool has a cabinet attached to the module by an umbilical. The cabinet houses the required power supplies and controllers for the module. The GMR module has a double cabinet attached by an umbilical.

Utilities Specification Requirements

Please refer to Chapter 3 of PVD GMR FACILITIES and INSTALLATION GUIDELINES located at the link below. file://\\wafapps\deptdata\Equip_Team\Maintenance\Vacuum_Tools\PVD_ADD_Documents\PVD_GMR_Facilities_and_Installation_Guidelines.pdf X:\Equip Team\Maintenance\Vacuum Tools\PVD ADD Documents\PVD GMR Facilities and Installation Guidelines.pdf]

Electrical Specifications

{| |width="160"|Voltage requirement||208 volts, 3 phase, 5 wire |- |Amperage ||330 Amps |}

Physical Dimensions

{|border="0" cellspacing="2" width="100%" |[[Image:52132-AE(English)_131.png|thumb|none|258px|Figure 1: Planetary Module]] |[[Image:52132-AE(English)_132.png|thumb|none|248px|Figure 2: PVD Module, Top View]] |[[Image:52132-AE(English)_133.png|thumb|none|250px|Figure 3: Transport Module]] |}

Assembly

Electrical Assembly

The electrical assemblies consist on Component / distribution racks that house modules such as the Techware Computer, DC power supply, Kepco power supply, VAT Throttle valve controller, Ion gauge controller, device controllers and power supplies. They are connected to the process module using an umbilical cable tray. {|width="780" |[[Image:52132-AE(English)_134.jpg|thumb|none|220px|Figure 4: Component Rack]] |valign="top"|[[Image:52132-AE(English)_135.jpg|thumb|right|380px|Figure 5: Umbilical Connection]] |}

Other Assembly Information

{| |valign="top"|6 Target GMR Process Module. This module consist of 6 target stations with magnetrons, CTI cryo pump(s), CTI water pump(s), VAT throttle gate valve(s) and various pressure, process gas and process cooling water control devices. CX7 Wafer Transfer Module and Cassette Loadlocks. This module consists of a Brooks robot, CTI cryo pump, CTI water pump, and is the central hub for all attached modules. Attached to the system facade is the main cabinet and loadlocks. The main cabinet houses the CTC computer, CTI On-Board Network Terminal controller, Black Box (module interface), UPS, PLC or TM Techware computer. |[[Image:52132-AE(English)_136.jpg|thumb|none|380px|Figure 6: GMR Process Module]] |} {|border="0" cellspacing="2" width="100%" | [[Image:52132-AE(English)_137.jpg|thumb|none|221px|Figure 7: GMR Transport Module]] || || [[Image:52132-AE(English)_138.jpg|thumb|none|221px|Figure 8: Cleanroom View]] |}

Operation Instruction

Operator Control

Operator control refers to maintenance personal operating the tool for maintenance and troubleshooting work. Maintenance shall refer to the vendor equipment operations manual, [{{SERVER}}/docs_add/VeecoPVD-10StandardManual.pdf Veeco PVD-10 Standard Manual].

Powering On and Off Tool

Powering Up Tool

PVD Start-up Check List

  1. Open ALL Service isolation valves
    • CDA
    • House N2
    • Water
    • Cryos
  2. Check for Water leaks.
  3. Turn on the system at the main power distribution rack
  4. Push start all power switches on the PDU.
  5. At the Mechanical pumps press start.
  6. At the cryo compressors turn on power. All cryos should then auto start a regen. Confirm this is correct.
  7. Check all gas line pressures and record. If the line pressure recorded at shut down is greater than current reading there is a leak on that line.
  8. Verify, log and initial when valve is opened. {| class="wikitable" !Gas Type !Pressure !Press. at shutdown !Open valve (initial) |- |Ar|| || ||  |- |N2H2|| || ||  |}
  9. IF there is no leak open the bottle isolation valve.
  10. Turn on the Techware control units and allow to boot up.
  11. Turn on Chamber heaters to SPVD and GMR chambers
  12. On SPVD start the turbo when up to speed pump chamber. Turn on Water pump.
  13. Turn on the OC7 PC. Log in.
  14. When all the cryos are cold, Pump all chambers
  15. Let chambers pump to < 1 X -6 Torr the turn off the heaters and start cool down of water pumps
  16. When water pumps are cold, set cryo gas volume to zero and reboot GMR Techware and Start CTC.
  17. Reset all modules|| 
  18. When chamber pressures < 2 X E-7 start burnin's.

Shutting Down Tool

  1. Regen warm-up all system water pumps wait until warm (approx 1 hour).
  2. Close all system HiVac valves. Check Hi Vac gauges turn off.
  3. Regen ALL cryo pumps.
  4. Close the SPVD foreline Vv and turn off the SPVD turbo pump
  5. Let all cryos go into extended Purge for ONE hour. Then turn off all compressors.
  6. Exit CTC and shut down PC.
  7. Turn off all Techware controllers at the mains isolation switch.
  8. Record all bottle pressures, close bottle supply valves and initial. {| |Gas Type |Pressure |Closed (Initial) |- |Ar|| ||  |- |N2H2|| ||  |}
  9. Turn off the system at the main power distribution rack
  10. Close ALL isolation valves for services supplying the system.
    • CDA
    • House N2
    • Water
    • Cryos
    • System
===Tool Alarms=== '''PCN (Process Change Notice) Request #006291901, '''Submitted by '''Richard Schwaninger/US/HGST''' on '''07/19/2013.''' When a PVD tool has an alarm for cryo pump temperature, i.e. the pump’s second stage has, even momentarily, exceeded 20K, the pump MUST be regenerated. This action must be taken even if the pump has recovered from a momentary rise in temperature at the time the alarm is acknowledged at the tool. In addition, the person acknowledging the alarm and who commences the regeneration process must check mesa and forum notes and identify the last time the pump was regenerated. This information must be included in the mesa entry and forum notes. Equipment engineering shall be notified by e-mail of the cryo pump alarm. [[Image:52132-AE(English)_139.png|borderless|600px]] [[Image:52132-AE(English)_140.png|borderless|600px]] [[Image:52132-AE(English)_141.png|borderless|600px]] [[Image:52132-AE(English)_142.png|borderless|600px]] ==Preventative Maintenance and Inspection== ===Preventative Maintenance Schedules=== Most PMs are scheduled in MESA. Monthly PMs are scheduled every 4 weeks. 6GMR Strip and Clean (S/C) PMs are scheduled for every 10 weeks or 6 weeks in MESA. Annual PM’s are scheduled every 12 months in MESA. SPVD Strip and Clean PM’s are based on every 3rd SPVD target change and therefore not scheduled in MESA. SPVD Etch Strip and Clean PM’s are performed every 3 months and scheduled in MESA. Gas Bottle changes are scheduled when the pressure reaches the minimum (ref section 5.1.27) allowable and are not scheduled in MESA. Magnetron swaps are performed when requested by manufacturing and are therefore not scheduled in MESA. {|class="wikitable" border="1" cellpadding="2" cellspacing="2" !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|''' PM Type (All)''' !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|''' Documented in MMM Section # or "Wiki"''' !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|'''Checklist (Y/N)''' !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|'''Match MESA? (Y/N)''' !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|'''Confirmed (Person)''' !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|'''Date''' |- |align = "center"|Monthly PM||align = "center"| 5||align = "center"|Y||align = "center"|Y||align = "center"|RES||align = "center"|4/7/2015 |- |align = "center"|Annual||align = "center"| 5||align = "center"|Y ||align = "center"|Y||align = "center"|RES||align = "center"| 4/7/2015 |- |align = "center"|S/C||align = "center"| 5||align = "center"|Y ||align = "center"|Y||align = "center"|RES||align = "center"|4/7/2015 |- |align = "center"|Gas Bottle||align = "center"|5||align = "center"|Y||align = "center"|Y||align = "center"|RES||align = "center"|4/7/2015 |- |align = "center"|Magnet / Motor Move||align = "center"|5||align = "center"|Y||align = "center"|Y||align = "center"|RES||align = "center"|4/7/2015 |- |align = "center"|Target change||align = "center"|5||align = "center"|Y||align = "center"|Y||align = "center"|RES||align = "center"|4/7/2015 |}

Preventative Maintenance Checklists

{|border="0" cellspacing="2" width="100%" |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_SPVDEtchPMCHECKLIST.doc|SPVD Etch PM Checklist]] |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_SPVDDepPMChecklist.doc|SPVD Dep PM Checklist]] |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/6GMR_SC_CHECKLIST.doc|6GMR Checklist]] |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_AnnualPMChecklist.doc|Annual PM Checklist]] |- |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_GasBottleChangeChecklist.doc|PVD ADD Gas Bottle Change Checklist]] |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_GMRMonthlyPMChecklist.doc|GMR Monthly PM Checklist]] |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_SPVDMonthlyChecklist.doc|SPVD Monthly Checklist]] |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_PVDSCGasBottleChangeChecklist.doc|PVDSC Gas Bottle Change Checklist]] |- |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_PVDADDMagnetronSwapChecklist.doc|PVD ADD Magnetron Swap Checklist]] |}

HGST Shield Part Numbers and Kit BOMs

For the following kits:
6GMR, 6", SPVD Deposition, 6", SPVD Etch, 6", 6GMR, 8" X:\Equip Team\Maintenance\Vacuum Tools\PVD ADD PVDi PVDSC PM\PVD PVDSC PM Shield Kit BOMs

Spare Parts and Shielding Part Numbers

See section HGST Shield Part Numbers and Kit BOMs ( above) for a link to Spare Parts BOM.

Yearly PM

General For general yearly PM, do the following:
  1. Change out all water filters to the entire system.
When performing this task, the cryo will warm up and the water vapor can cause ion gauge failures. To prevent this from happening, shut off all ion-gauges warm up the water pumps. After completion of warming the waterpumps, close all high vac-valves before changing out the filters.
PVD (1 Target) Module
For PVD yearly PM, check the rail and bearings on the shutter assembly, check for wear and cleanliness.
If they need to be replaced (Refer to Section 5.1.2 for details on the procedures.)''
GMR (6 Target) Module
For PVD yearly PM, grease the ball screw bearings on the J-arm lift assembly (Refer to Section 5.1.16 for details on the procedures).
Remove the Clamping ring around the copper pedestal and clean the insulator. Replace if necessary.
==Maintenance Procedures==

Burn in Requirements

Various burn in requirements depending on the nature of the PM or repairs performed are required. The primary difference in burn in recipes are time required. Burn is also required after a certain amount of tool idle time. Appendix C of MPI 037-001 and MPI 037-259 specify the required burn in based on the amount of idle time, PM or repair activity which has been carried out. Burn in must be run from APC. If you need assistance with running the burn in from APC contact a cell director or process technician. A burn-in of all targets must be performed by maintenance when:
  1. The process chamber has been vented.
  2. No production runs have been made for more than 12 hours. A short TESTBURNALL burn-in recipe should be used when no production runs have been made for more than 12 but less than 36 hours. {|border="1" cellspacing="0" cellpadding="4" |align = "center"|Hours Dep Tool Not Used||align = "center"|Burn-in Requirement |- |align = "center"|< 12 hrs||align = "center"|none |- |align = "center"|12 – 36 hrs||align = "center"|TESTBURNALL |- |align = "center"|> 36 hours||align = "center"|BURNALL |}
  3. Engineering requests it.
  4. Magnetron swap is performed.
===Tool Setup===

Process Module Target Change Procedure for DC Magnetron

The following are steps require when performing a target change. Please read all notes and cautions in this procedure. They provide valuable information, which will insure success. The module’s current base pressure and perform a Rate of Rise. The rate of rise should be below 5.6 X E-6 torr-liters / second.
  1. Blow out all water going to Cathode assembly.
  2. Disconnect the module's cooling water, and turn on the chamber heaters(Set the heater controller to a duty cycle of 80% and wait at least one hour before venting chamber).
Turn off the Target Power Supply before removing the connections {|width="780" |valign="top"|
  1. Disconnect the supply and return water line fittings, DC power supply connector, and magnetron power and control supply connector on top of Cathode assembly.
|[[Image:53143-N(English)_101.png|right|bordeless|379px]] |} {|width="780" |valign="top"|
  1. Remove all screws holding Cathode cover.
|[[Image:53143-N(English)_102.png|right|borderless|275px]] |} {|width="675" |valign="top"|
  1. Lift the Cathode cover and remove the inside magnetron power and control supply connector, DC power supply cable, and the ground cable.
|[[Image:53143-N(English)_103.png|borderless|right|160px]] |}
  1. Remove both target water feed brazements by removing the two retaining bolts.
  2. Remove the cathode cover and store in a safe place.
  3. Mark the position of the retaining ring with the lid. (This is to insure that during re-installation it is returned to the exact position).
  4. Then remove all the bolts that hold down target retaining ring. (This step allows the removal of the target retaining ring and magnetron motor assembly as a whole unit.)

Always store the magnetron assembly away for all magnetic materials. Remove wristwatch if desired.
{|width="675" |valign="top"|
  1. Remove the target retaining ring and magnetron motor assembly from the target lid and store in a safe place.
  2. Vent the module by running the Vent batch program for the process module on the CVC Module Controller. |[[Image:53143-N(English)_107.png|borderless|right|160px]] |} {|width="768" |valign="top"|
    1. Remove the upper Teflon insulation ring and store in a safe place.
    |[[Image:53143-N(English)_108.png|borderless|right|260px]] |} {|width="765" |valign="top"|
    1. Insert two "Eye" bolts in the target backing plate. Also, mark the position of the water feed brazement on the target-retaining lid.
    |[[Image:53143-N(English)_109.png|borderless|right|265px]] |} {|width="675" |valign="top"|
    1. Remove the target backing plate assembly and store in a safe place.
    2. Occasionally the lower Teflon insulation ring will come off with the target backing plate. If this happens carefully remove it from the target backing plate and inspect for nicks, scratches, abrasions, scuffs etc.,
    3. If damaged, then replace and clean with Isopropyl Alcohol (IPA), and perform the next two steps. If not skip them.
    4. Wipe the target lid O-ring and the surrounding area clean with IPA. |valign="top"|[[Image:53143-N(English)_110.png|borderless|right|160px]] |} {|width="675" |valign="top"|
      1. Re-install the lower Teflon insulation ring, located on top of the target lid "O" ring. Insure that the flat side of the Teflon insulation is placed on the bottom next to the O-ring. |[[Image:53143-N(English)_112.png|borderless|right|160px]] |} {|width="675" |valign="top"|
        1. Prior to installing the new target backing plate assembly, ensure that a new O-ring has been installed, inspected and that both the O-ring, its groove and surrounding area have been cleaned with IPA.
        2. Install new target backing plate assembly by lining it up with position marks on the target retaining lid you made (water feed brazement marks) and carefully center it on the lower Teflon insulation ring. |[[Image:53143-N(English)_110.png|borderless|right|160px]] |}
          1. Once the new target backing plate is positioned, remove both "Eye" bolts.
          2. Pump down the process module at the '''CTC\System\Vacuum\Vacuum valves'''.
          3. Once the module has crossed over to Hi Vac vacuum, perform a Helium leak check.
          Do not go any further until the new target backing plate passes a leak check. {|width="768" |valign="top"|
          1. Install the Kapton tape between two water connections. The HGST part number: 660000314751
          2. Re-install the upper Teflon insulation ring, insure that it center on the lower Teflon insulation ring. Clean with IPA.
          |[[Image:53143-N(English)_108.png|borderless|right|260px]] |} {|width="675" |valign="top"|
          1. Re-install target retaining ring and magnetron motor assembly by lining up your position marks and tighten all bolts evenly by alternating with it’s opposite. (i.e. the bolts that 180 degree away)
          |[[Image:53143-N(English)_107.png|borderless|right|160px]] |}
          1. Place cathode cover over magnetron motor assembly and connect target water feed brazements to the target backing plate. Again, evenly tightening all bolts.
          On the bottom of target water feed brazement there is an O-ring. Insure that O-ring is there prior to installation and inspect O-ring for serviceably. Failure to have an O-ring or one that is not serviceable will cause a water leak, which may caused the target to short out. {|width="675" |valign="top"|
          1. Connect the inside magnetron power and control supply connector, DC power supply cable, and the ground cable.
          2. Connect the supply and return water line fittings, DC power supply connector, and magnetron power and control supply connector on top of Cathode assembly. |[[Image:53143-N(English)_103.png|borderless|right|160px]] |}
            1. After the process module has pumped down to 5 x 10-7 torr, turn off the chamber heaters and reconnect the module’s cooling water.
              • Prior to installing and tightening the cathode cover screws, wait at least ten minutes and inspect the target water feed brazement for water leaks.
              • Test rotate the magnetron through the CTC\System\Process\Dep
            ====PVD Shutter Rail and Bearing Replacement Procedure==== The following steps and illustrations are to be used to remove and replace the shutter slide rails and bearings for a single target PVD process module: # Vent the process module. # Remove the cathode assembly exposing the chamber. Ensure the shutter is retracted. (Fig 1) # Loosen the Allen screw securing the front center of the shutter assembly. (Fig 1) [[Image:52132-AE(English)_172.png|thumb|none|296px]] [[Image:52132-AE(English)_52.gif|framed|none]] [[Image:52132-AE(English)_45.gif|framed|none]] Figure 1 # Disconnect the pneumatic lines and power connector for the shutter pneumatic cylinder. (Fig 2) [[Image:52132-AE(English)_48.gif|framed|none]] [[Image:52132-AE(English)_173.png|thumb|none|249px]] [[Image:52132-AE(English)_50.gif|framed|none]] Figure 2 ---- # Remove hex nuts from studs around the rear shutter assembly mounting plate. (Fig 3) [[Image:52132-AE(English)_174.png|thumb|none|244px]] [[Image:52132-AE(English)_46.gif|framed|none]] [[Image:52132-AE(English)_43.gif|framed|none]] [[Image:52132-AE(English)_59.gif|framed|none]] Figure 3 # Pull the shutter assembly out of its housing and place on a clean workbench. # Remove the two Allen screws on the rear of the shutter blade to remove the shutter blade and spacer block from the slide assembly. (Fig 4 and Fig 5) [[Image:52132-AE(English)_175.png|thumb|none|232px]] [[Image:52132-AE(English)_51.gif|framed|none]] [[Image:52132-AE(English)_49.gif|framed|none]] Figure 4 [[Image:52132-AE(English)_176.png|thumb|none|248px]] [[Image:52132-AE(English)_57.gif|framed|none]] [[Image:52132-AE(English)_55.gif|framed|none]] [[Image:52132-AE(English)_53.gif|framed|none]] Figure 5 ---- # Remove the Allen screws holding the bearing blocks onto the bottom of the slide plate. This will separate the rail assembly from the shutter assembly. [[Image:52132-AE(English)_177.png|thumb|none|92px]] [[Image:52132-AE(English)_111.gif|framed|none]] (Fig 6 and Fig 7) [[Image:52132-AE(English)_44.gif|framed|none]] [[Image:52132-AE(English)_178.png|thumb|none|302px]] [[Image:52132-AE(English)_47.gif|framed|none]] Figure 6 [[Image:52132-AE(English)_54.gif|framed|none]] Figure 7 # Loosen Allen screws for rail clamps. (Fig 8) [[Image:52132-AE(English)_56.gif|framed|none]] [[Image:52132-AE(English)_60.gif|framed|none]] Figure 8 [[Image:52132-AE(English)_179.png|thumb|none|165px]] # Slide rails out of clamps [[Image:52132-AE(English)_58.gif|framed|none]] # Slide bearings off rails. # Obtain two new rails slide one end through a rail clamp, slide two new bearings onto each rail, and slide the other end of the rail through the second rail clamp. # Position the rails evenly in the clamps and tighten the Allen screws. # Attach the slide assembly to the shutter assembly by mounting the bearing blocks to the bottom of the slide rail plate. (Fig 6 and Fig 7). # Mount the shutter blade and spacer block, on the slide plate, with two Allen screws. Make sure the screws are tight and the blade is centered. (Fig 4 and Fig 5) # Manually slide the shutter blade and slide plate back and forth on the new rails. The assembly should move easily and smoothly with no binding. Adjust as required. # Slide the shutter assembly into the rear of the shutter housing and replace the hex nuts around the outside of the shutter assembly mounting plate. (Fig 3) # Connect the pneumatic lines and electrical connector to the shutter pneumatic cylinder. (Fig 2) # Tighten the Allen screw on the front center of the shutter slide rail assembly. (Fig 1) # Test the shutter by extending and retracting it by using the Techware controller. Use the status or relay test screen, for single step modules, and the '''ti''' screen, for multi-step modules. Make sure the shutter blade centers in the chamber. Adjust as required. # Replace the cathode assembly and pump down the module. # Leak check effected areas. ====Vent and Pumpdown Procedure for the PVD Multi Step Module==== # Turn the water off to the module. '''Note: The water shut water valves located on the Central Wafer Handle. For PVD-1 and #2 the valves for the water must be turned off at the TM. For PVD #3,4,5, and 6 turning on the heater automatically turns off the water.''' # Turn the heat on and set the heater duty cycle to 80%. # [[Image:52132-AE(English)_63.gif|framed|none]] Wait a minimum one-hour for the chamber to heat up. # [[Image:52132-AE(English)_62.gif|framed|none]] Select the TI Screen. TI Screen: [[Image:52132-AE(English)_64.gif|framed|none]] [[Image:52132-AE(English)_180.png|thumb|none|500px]] # Enter the direct control mode. Select the '''PMC.Change''' field and then select the Service option from the options on top of the screen. Wait until the '''PMCMode''' field changes from''' '''Process to Service''' '''Mode. # Select the '''PGC.Cmd''' field and then select the Vent1 option from the options on top of the screen. '''Note: The Vent1 program will automatically close Hi Vac valve and the vent valve will open.''' # Regen the main cryo pump from the CTI controller.(If required) # Remove the lid and perform required maintenance. ====Pumpdown==== # Prior to closing the lid clean the "o"-ring and seal surfaces. # Select the TI Screen. ---- [[Image:52132-AE(English)_61.gif|framed|none]] [[Image:52132-AE(English)_181.png|thumb|none|500px]] # Enter the direct control mode. Select the '''PGC.Cmd''' field (see page1) and then select the Pump1 option from the options on top of the screen. '''Note: The Pump1 program pumps the module to down to process pressure.''' # Once the chamber pressure reaches 5 x 10-07, turn on the water and turn off the heat. # Select the TI Screen. # Enter the direct control mode. Select the '''Stop '''field. This stops all programs that are currently running. Then, select the '''Run''' field and choose the '''mesc''' option from the on top of the screen '''Note: This returns the module to the process mode.''' ====Vent and Pumpdown Procedure for the PVD Fix Step Module Vent==== # Turn the water off to the module. '''Note: The water shut water valve is located on the central wafer handler.''' # Turn the heat on and set the heater duty cycle to 80%. # Wait a minimum of one hour for the chamber to heat up. # Select the LOGO Screen. [[Image:52132-AE(English)_182.png|thumb|none|574px]] [[Image:52132-AE(English)_65.gif|framed|none]] [[Image:52132-AE(English)_66.gif|framed|none]] Enter the direct control mode. Select the Stop field. This stops all programs that are currently running. Then, select the Run field and choose the Vent option form the top of the screen. '''Note: The Vent program automatically closes the hi-Vac valve and the vent valve opens.''' # Regen the main cryo pump from the CTI controller (If required). # Remove the lid and perform required maintenance. ---- '''Pumpdown:''' # Prior to closing the lid clean the "o"-ring and seal surfaces. # Select the LOGO Screen. (See: Page one) Enter the direct control mode. Select the Stop field. This stops the program that is currently running. Then, select the Run field and choose '''mesc.PM''' option form the top of the screen. # After the chamber pressure reaches 5 x 10-07, turn on the water and turn off the heat. ====Chuck Removal PVD==== If the bellows must be removed, for some reason here is the procedure. '''IT IS ESSENTIAL TO HAVE SOME METHOD OF ATTACHING THE CRANE TO THE CHUCK FOR LIFTING IN AND OUT''' '''OF THE MODULE.''' '''UNLESS "VERY LUCKY" YOU WILL NEED TO DO THIS AT LEAST TWICE.''' '''IT WILL HELP TO GUIDE IN THE CHUCK IN SHORT STEPS.''' # Take out all shielding, including the clamp ring. The shutter is optional. # Disconnect wires from filter box # Disconnect water connections # Disconnect the matching network strap # The chuck is now totally disconnected. # Take off the brackets on the inner chuck # We are now ready to remove the chuck. # Attach to crane and lift straight up, guiding wires and pipes up. When in doubt ask the engineer # When out, place it on the floor, upside down, so as not to bend any of the pipes. ====Bellows Replacement==== # Follow the procedure for chuck removal and then continue on. # If just taking out the chuck then you can leave the matching network etc. on. If the bellows are being removed then take this off, which is straightforward and simple. # Take off the brackets on the inner chuck The screws that hold the bellows are located at the bottom of the chamber stack. {|border="0" cellspacing="2" width="100%" |'''[TIP]''' ||'''Place screwdriver handle or something under linear actuator, before unscrewing. This relieves the strain on''' |} '''the screws as you take them out and the outer bracket remains in place when you have taken out the screws.''' # We are now ready to remove the chuck. # Somehow attach to crane and lift straight up, guiding wires and pipes up. # When out, place it on the floor, upside down, so as not to bend any of the pipes. # Take out the Teflon spacers and o-rings. You can now unscrew bellows from the topside. Lift out the chuck bowl, and then the inner chuck. # The bellows are now sitting in front of you, in the bottom of the chamber stack. Remember to keep o-rings. '''CLEAN CHAMBER TOTALLY''' # Replace bellows, CLEAN O-RINGS UNTIL SPOTLESS and remember to locate pin in hole. # Screw in screws at the bottom of the stack i.e. the outer bracket and linear actuator. Bellows are now secure at the bottom of the chuck. # Reinsert inner chuck, remembering to align at the bottom for the mounting brackets of the network etc. # Replace the o-ring on the top of the bellows and place chuck bowl on top of bellows and screw down. Clean bowl totally and replace o-ring, Teflon spacer and second o-ring. '''NOW READY TO REINSERT CHUCK, DON’T FORGET TEFLON SPACER IN MIDDLE OF BOWL.''' # Guide wires, pipes etc. down the hole. Slowly lower chuck using crane separating the wires, pipes etc. at the bottom of the chuck, to their respective gateways. Make sure water connections point right directions. # Just before the complete lower down of the chuck, wipe top of o-ring and sealing surface of the chuck. Then lower straight down. # Replace clamp ring and check for leaks. # IF OK put back shielding and perform wafer transfer. If not OK try and pinpoint leak else pull chuck and clean o-rings and sealing surfaces. '''Linear Actuator Troubleshooting:''' If the linear will not move, check there is no obstruction, also check that the controller is operating correctly. Refer to the OEM manual for a description, here is a troubleshooting guide. {|border="2" cellspacing="0" cellpadding="4" width="86%" |'''Cylinder overshooting the position'''||speed set too high

            system gain set too high||reduce ’HIGH’ speed pot (CCW)

            increase ’DECEL" pot (CW) |- |'''Cylinder oscillates about the stop position. (In position led flickers)'''||System gain set too high||Reduce "LOW" Speed Gain (CCW)
            Reduce "SENS" Setting (CCW)
            increase "DECEL" Distance (CW)
            |- |'''Cylinder does not achieve final position. (in pos light does not come on at the end of a move)'''||Not enough motor power to move load at low speed||increase "LOW" speed gain (CW)

            increase "SENS" setting (CW) |- |'''slow system response'''||speed setting too low

            ecal distance too large||increase HIGH speed (CW)
            reduce DECEL (CCW) |- |'''reduced overall travel length'''||setup & scaling for a given command signal incorrect

            End of travel limit setting incorrect.||Review setup & operation for command signal being used.

            Reduce EX-L setting (CCW) for extend distance or reduce RT-L for retract distance. |- |'''Cylinder lunges to either Physical end of travel when power applied.'''||Linear feedback lost.

            Polarity of motor or the linear pot wiring Reversed.||Check cabling for linear pot
            Check resistance of Lin. Pot

            Check wiring for motor & linear pot. |- |'''Stall LED comes on frequently when a move is attempted'''||Current sense setting too low
            Cylinder/Load binding

            Velocity set too high for given load
            Command signal changing too rapidly||Increase current sense (CW)
            Check unloaded cylinder operation. Mechanical mounting of load.

            Reduce HIGH speed (CCW)

            increase SENS Setting (CW) |- |'''Cylinder Suddenly moves to the fully retracted position.'''||Command signal lost||Check wiring for command signal or for problems with the signal source |- |'''Cylinder doesn’t move'''||Power off
            No DC Power at control

            Fuse blown
            Speed setting too low
            STOP OR DISABLE INPUTS activated & maintained
            No power to Motor||Check AC power
            Check for 24VDC at terminals 1&2 on TB1
            Replace Fuse
            Increase HIGH Speed (CW)
            Deactivate inputs

            Check motor wiring |} ====Magnetron Leveling==== '''Tools Required:''' Flat Head screwdriver 10 mm combination wrench Calibrated Micrometer Calibrated Dial Indicator '''Procedure:''' # Turn Power off to DC power supply. # Remove Cathode Motor control cable. # Remove brass screws that secure the High Voltage Lid; Remove lid. # Using dial indicator rotate the magnet array 360 while measuring the surface deviation of the pole plate. The deviation should not exceed .010 inches at any given point from mean. If the tolerance is exceeded the error must be corrected prior to proceeding. # Locate the Ground strap that is attached to the target retaining ring. Remove the brass screw that attaches it. # Remove the four leveling screw capture nuts located in the corners of the Magnet array assembly. # Remove Magnet array assembly from the cathode assembly and transport to a flat, Non-Magnetic working surface. '''Note: If insulated tape has not been applied to the target backing it should be applied at this time to reduce the chance of electrical arcing from the Magnet array to the target backing plate.''' # Using a Micrometer measure the thickness of the magnet array from the back of the magnet backing plate to the surface of the outer magnet element. Compare this with all of the outer magnet elements to locate the largest reading. When located mark this position on the magnet array with a marker. Record this value as Magnet array thickness in table 1. # Insert the desired Magnet array to target backing plate distance as Gap value in table 1. '''Caution! This value should not be less than .050 inches as arcing may occur under certain conditions resulting in damage to the Magnet array and the target.''' 10. Add the two values together to create the level distance (from target backing plate). ====Plasma Starter Filament Check==== # Disconnect the plasma starter cable from the feed through located either on the side (single wafer module) or lid (batch module) of the process module. # Using an ohmmeter, measure the resistance of the starter filament. The resistance should be less than 2 ohms. If the filament is not less than 2 ohms, the filament will need to be replaced. # Reconnect the plasma starter cable to the feed through. ====0 Capacitance Manometer Check==== # Verify that all of the Connexion’s capacitance manometers are reading zero, otherwise zero from Techware # Verify that all of the process modules and the WTM are under high vacuum. # Open all process module MESA valves, and turn off all ion gauge filaments. # On all of the process modules, open the manometer isolation valves. # Close the hi Vac valves on the WTM and all of the process modules. # Flow 5 sccm of gas in one of the process modules until its capacitance manometer reads 30 mTorr, and then close the gas isolation valve. # Wait 3 minutes for the system pressure to stabilize. # Compare all of the manometer readings; they should be +/- 1 mTorr. # Open the process module and WTM hivac valves. # Close all of the MESA valves and turn on the entire ion gauge filaments. '''Chuck Megohmmeter Procedure''' '''Equipment Required: '''megohmmeter '''Procedure:''' This procedure is used to insure that the chuck has no shorts and must be conducted either at atmosphere or under high vacuum conditions. Failure to perform under these conditions can cause plasma in the chamber. {|cellspacing="0" cellpadding = "10" style="border-style:solid; border-color:black; border-width:1px;" width="100%" |align = "center"|'''Caution:''' |- |'''Do Not exceed 1500 volts. Exceeding this voltage limit can cause a system failure.''' |} # Inspect the chuck for any flakes that could cause the chuck to ground to short circuit. If flaking is present, remove prior to conducting the megohmmeter testing. # Disconnect the electromagnet wire leads to the filter box. The filter box is located inside the chuck water feed box. # Disconnect the chuck water feed. ---- [[Image:52132-AE(English)_67.gif|framed|none]] [[Image:52132-AE(English)_69.gif|framed|none]] [[Image:52132-AE(English)_68.gif|framed|none]] [[Image:52132-AE(English)_70.gif|framed|none]] [[Image:52132-AE(English)_183.png|framed|none]] # Disconnect the R.F. matching network feed-through strap from the chuck water line brazement. # Connect one lead to the chuck water line brazement and the other to the chamber. ====Electromagnet and Kepco Power Supply Test Procedure==== '''EQUIPMENT REQUIRED:''' # Multimeter # Techware service terminal '''APPLICABLE DOCUMENTS:''' # CVC B-304824 (GMR B-310668) SQUARE WAVE GENERATOR DRAWING # KEPCO POWER SUPPLY MANUAL. '''PROCEDURE (Parallel Magnet and Normal):''' Check all connections to the following: # CVC Square Wave Generator (SWG) # Kepco Power Supply # Electro Magnet (approximately 2 ohms resistance, GMR 3.8 ohms ) See: Electromagnet Test Procedure # Confirm there is water to the chuck to meet the interlock conditions. # Measure + 15 volts on terminal 5 and -15 volts on terminal 6 on the SWG. # Turn + Voltage and + Current Limits fully clockwise on the front panel of the Kepco supply. # Turn the –Voltage and –Current limits fully counterclockwise on the front panel of the Kepco supply. ---- On Techware screen set Fields on Kepco as follows: {|border="2" cellspacing="0" cellpadding="4" width="59%" |Interlock||ON||MAG.FREQ||.25 Hz |- |MAG.CONTACT||ON||MAG.CURRENT||10 A ( GMR 6A) |- |KEPCO. OUTPUT||ON||MAG.VOLTAGE||N/A |- | || ||MAG.DUTY||55% |} Kepco front panel voltage and current meters should swing to + 10(GMR + 6) amps in both directions ~ 3 second interval. The duty and amplitude should be fairly even between plus and minus current. Also voltage meter display should be between 15 and 19 (GMR 22) volts. If dual electromagnet repeat the above procedure. Magnet Orientation: [[Image:52132-AE(English)_75.gif|framed|none]] Parallel: [[Image:52132-AE(English)_72.gif|framed|none]] [[Image:52132-AE(English)_74.gif]] ---- [[Image:52132-AE(English)_71.gif]] [[Image:52132-AE(English)_73.gif|framed|none]] ---- ---- {|border="0" cellspacing="2" width="100%" |  ---- || || || || || || (Windings of magnet are normal to the flat) |} If dual electromagnet, repeat for the normal magnet. [[Image:52132-AE(English)_78.gif|framed|none]] Normal: [[Image:52132-AE(English)_79.gif|framed|none]] [[Image:52132-AE(English)_77.gif]] [[Image:52132-AE(English)_82.gif|framed|none]] [[Image:52132-AE(English)_81.gif|framed|none]] [[Image:52132-AE(English)_80.gif|framed|none]] [[Image:52132-AE(English)_83.gif|framed|none]] [[Image:52132-AE(English)_76.gif]] ---- {|border="0" cellspacing="2" width="100%" | || || || || || (Windings of magnet are parallel to the flat) |} Normal Magnet (Field strength in the normal direction, reference to wafer flat or notch.) {|border="2" cellspacing="0" cellpadding="4" width="39%" |align = "center"|
            ----
            _________||Magnet array thickness |- |align = "center"|_________||+ Gap Value |- |align = "center"|_________||Level Distance |} '''Table 1''' # Install the magnet array assembly back into the cathode assembly # Measure the distance from the point marked on the magnet plate in step 7 to the target backing plate at 90-degree points. Adjust leveling screws to match the Level distance as shown in table one. Repeat this procedure until all four points match insuring that there is pressure applied by the leveling screws to the support bracket. This can be checked by applying pressure to each corner of the assembly and observe for rocking of the assembly. # Install capture nuts previously removed in step .5. Tighten carefully as not to change the level distance reading. Recheck level distance at four previously measured spots. ---- # Connect the cathode motor control cable previously removed in step 2. From the PAL status screen Select Cathode motor "On". Verify the motor rotates freely and that the motion sensor is accurately feeding back to the Techware controller through the digital input screen. # Turn Cathode motor off; remove Cathode motor control cable. # Reassemble all components in reverse order. '''Electromagnet Test Procedure''' The following procedure is to be used when testing the electromagnet for a short. There are two different methods: one using a multimeter, the other using a megohmmeter. The megohmmeter testing procedure will detect high resistance shorts. '''Equipment Required: '''Multimeter or megohmmeter '''Procedure for Using a Megohmmeter:''' # Disconnect the electromagnet wire leads to the filter box. The filter box is located inside the chuck water feed box. # Disconnect the chuck water feed. # Disconnect the R.F. matching network feed-through strap from the chuck water line brazement. # Connect one lead from the megohmmeter to the electromagnet lead coil, the other lead of the megohmmeter to the chuck water line brazement. {|cellspacing="0" cellpadding = "10" style="border-style:solid; border-color:black; border-width:1px;" width="100%" |align = "center"|'''Note:''' |- |'''Testing of magnets ''''''''must not'' ''''''exceed 2000 volts as the insulation may be permanently damaged.''' |} '''Procedure for Using a Multimeter:''' # Disconnect the electromagnet wire leads to the filter box. The filter box is located inside the chuck water feed box. # Measure the resistance across both electromagnets leads using the multimeter the results should be approximately 2. Ohms. (GMR 3.8 ohms) # Measure the resistance from one electromagnet lead to the chuck water line brazement the results should be open. ====Removal of the Ball Screw Assembly==== The following procedure is for removing the Ball Screw Assembly on the "J" arm Lifting Assembly. # Vent the GMR Module by running the Vent Batch program on the CVC Module Controller. '''Caution:''' {|border="2" cellspacing="0" cellpadding="4" width="100%" align="left" |'''This procedure must be done at atmosphere. If not the bellow might collapse up due to force of the atmosphere.''' |}
            #
            Select the TI screen and move the "J" arm Lift to its’ lowest "Z" position using the CVC Module Controller # Set the "J" arm lift Stepper Motor circuit breaker, located in the process module control cabinet, to the off position. '''Note: ''''''''This will allows the ball screws to be manually moved.''''' # Lower the lower drive plate until it contacts the guide rod stops. This is done by turning one ball screw. (See Figure 2) '''Note: ''''''''The other Guide Rods one will follow because they are still connected to the drive belts.''''' ---- '''''Side View of the GMR lower area showing the Guide Rods: (Figure 1.)''''' [[Image:52132-AE(English)_90.gif|framed|none]] [[Image:52132-AE(English)_93.gif|framed|none]] [[Image:52132-AE(English)_84.gif|framed|none]] [[Image:52132-AE(English)_94.gif|framed|none]] [[Image:52132-AE(English)_184.png|thumb|none|497px]] [[Image:52132-AE(English)_87.gif|framed|none]] # Loosen the drive belts by loosing the Stepper Motor Retaining plate located above the stepper motor. (See Figure 1.) ---- Loosen the drive belt pulley until it spins freely. This is done by simultaneously attaching a wrench on the transtorque coupling on the pulley and the bottom of ball screw. (Figure 2)''''' ''Note:''' ''Each drive belt pulley has one transtorque coupling.'' ''It maybe either be located on the top of pulley or on the bottom of the pulley.'' '''''Side View of the Ball Screw Assembly: (Figure 2.)''''' [[Image:52132-AE(English)_91.gif|framed|none]] [[Image:52132-AE(English)_97.gif|framed|none]] [[Image:52132-AE(English)_99.gif|framed|none]] [[Image:52132-AE(English)_185.png|thumb|none|600px]] [[Image:52132-AE(English)_85.gif|framed|none]] [[Image:52132-AE(English)_88.gif|framed|none]] # Remove the bolts from the top bearing housing. (Figure 3.) # Remove the bolts from the lower ball nut. (Figure 3.) '''''Side View of the GMR lower area showing Ball Screws Assembly (Figure 3.)''''' [[Image:52132-AE(English)_89.gif|framed|none]] [[Image:52132-AE(English)_86.gif|framed|none]] [[Image:52132-AE(English)_95.gif|framed|none]] [[Image:52132-AE(English)_92.gif|framed|none]] [[Image:52132-AE(English)_186.png|thumb|none|318px]] # Using a spanner wrench remove''' '''ball screw retaining nut on top of the top bearing housing. (Figure 4.) # Carefully remove the top bearing housing off the ball screw. (Figure 4.) # Carefully remove the drive belt pulley off the ball screw and the transtorque coupling. (Figure 4.) # Carefully remove the Lower Ball Nut and the ball and Ball Screw. (Figure 4.) # Replace with new Ball Screw Assembly. # Reverse the process to re – install. ---- '''''Side View of the Ball Screw (Figure 4.)''''' [[Image:52132-AE(English)_96.gif|framed|none]] {|cellspacing="0" cellpadding = "10" style="border-style:solid; border-color:black; border-width:1px;" |Ball Screw Retaining Nut
            (Remove this nut -Use spanner wrench.)

            |} [[Image:52132-AE(English)_112.gif]] [[Image:52132-AE(English)_100.gif|framed|none]] [[Image:52132-AE(English)_98.gif|framed|none]] [[Image:52132-AE(English)_187.png|thumb|none|137px]] '''Note 1: ''''''''Bolts on the Upper and Lower Ball Screw are torque to 14Nm or 10. Ft lb.''''' '''Note 2: ''''''''The Transtorque Coupling is torque to 88Nm or 120 ft lb.''''' ====Cryopump Set up and Regeneration==== '''Network Addresses CX 8 (Original, settings may have changed)''' {|border="2" cellspacing="0" cellpadding="4" width="52%" |'''CRYO-PUMP STATIONS'''||'''IDENTIFICATION (Ide.)#''' |- |WAFER TRANSPORT MODULE (WTM)||00 |- |CASSETTE ELEVATOR (CE) A||01 |- |PROCESS MODULE (PM) 1||02 |- |PM2||03 |- |PM3||04 |- |PM4||05 |- |PM5||06 |- |PM6||07 |- |CASSETTE ELEVATOR (CE) B||08 |- |WATER PUMP||09 |} ---- '''Programming Network Controller''' for '''Cryo-Pump''' '''parameters''': [[Image:52132-AE(English)_188.png|thumb|none|437px]] SYMBOL 183 \f "Symbol" \s 10 \h '''''Select''''' the '''''Regen Screen''''' and '''''enter''''' Cryo-Pump '''''Ide #'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press''''' the '''''Next Key''''' to '''''select''''' each of the following '''''parameters'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press''''' the '''''Enter Key''''' to '''''change''''' and '''''save''''' each of the following '''''parameters''''': ---- {|border="2" cellspacing="0" cellpadding="4" width="35%" |'''VALUE'''||'''UNITS'''||'''PARAMETERS''' |- |0.0||Hrs.||Delay (Dly) Start |- |0.0||Hrs.||Delay (Dly) Restart |- |150||sec.||Fast Rough Test |- |60||min.||Extended (Extd) Purge |- |5||min.||Repurge |- |20||N/A||Repurge Cycles |- |50||U||Base Pressure |- |10||u/min||Rate-of-Rise (Ror) |- |10||U||Rate-of-Rise (Ror) |- |1||N/A||Rough Valve Interlock |- |*ON
            ||N/A||Power Fail |- |25||K||Power Fail Temperature (Temp) |} SYMBOL 183 \f "Symbol" \s 10 \h '''''Confirm''''' all '''''parameters''''' are '''''entered''''' and '''''saved'''''. '''Note:''' {|border="2" cellspacing="0" cellpadding="4" width="32%" |'''Enter 1 to change this parameter.''' |} '''Programming Network Controller''' for '''Cyro-Pump identification''': SYMBOL 183 \f "Symbol" \s 10 \h '''''Select''''' the '''''Service Screen''''' and '''''enter''''' Local '''''Ide. # 99'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press''''' the '''''Next Key''''' three times. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press '''''the''''' Enter key''''' when '''''<<Password>>''''' is '''''displayed'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press''''' the '''''Next Key''''' two times. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press''''' the '''''Enter Key''''' when '''''<<Rough Valve Map>>''''' is '''''displayed'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Enter''''' any Cryo-Pump stations '''''Ide.(s)''''' that are '''''present''''' (00-05). SYMBOL 183 \f "Symbol" \s 10 \h '''''Press''''' the '''''Enter Key''''' two times after '''''last Ide. #''''' typed (necessary in order to '''''save''''' values). SYMBOL 183 \f "Symbol" \s 10 \h '''''Confirm''''' all '''''values''''' are '''''entered''''' and '''''saved'''''. '''Starting''' Cryo¬-Pump '''Regeneration''': SYMBOL 183 \f "Symbol" \s 10 \h '''''Select''''' the '''''Regen Screen''''' and '''''enter''''' Cryo-Pump '''''Ide #'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press 1''''' to '''''start'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Press 2''''' to '''''confirm normal''''' regeneration or '''''Press 3 '''''to '''''confirm fast''''' regeneration. SYMBOL 183 \f "Symbol" \s 10 \h '''''Monitor''''' Cryo-Pumps '''''until''''' they have achieved '''''Cooldown Stage'''''. SYMBOL 183 \f "Symbol" \s 10 \h '''''Recheck''''' Cryo-Pumps '''''after Cooldown Stage''''' to '''''confirm complete''''' regeneration ('''''30-75mins.''''' Depending on '''''type''''' of regeneration used.) * '''''Target conditioning after regeneration. A'''''fter regeneration of pumps located in a deposition module, a TESTBURNALL must be run in order to condition targets. Process Modules & Wafer Transport temperatures of first and second stages: First Stage 65 +/- 4 degrees Kelvin Second Stage 11 +/- 2 degrees Kelvin Cassette Pump temperatures where applicable: First Stage 65 +/- 4 degrees Kelvin Second Stage 11 +/- 2 degrees Kelvin ====Poppet Valve Cleaning==== The poppet valve should only be cleaned when the pump fails the ROR test and other causes of leakage have been eliminated. All handling of vacuum components should be done with clean room gloves. # Once the regen has aborted due to failure to pass the ROR test, the pump will idle. Unscrew the valve carefully. # Do not scratch any sealing surface while removing the o-rings. Remove both o-rings carefully. The smaller o-ring will fall out easily. The thicker one is compressed between an o-ring groove and a knife edged spring-loaded sealing surface. If the spring-loaded sealing surface is flat, it is an older style poppet valve and can be upgraded to the newer design. (CTI Part number 8080250K045). # Wash the poppet relief valve mechanism with isopropyl alcohol and dry it with compressed nitrogen or air. # Wash the o-rings with isopropyl alcohol and wipe with a lint-free cloth. Some clean room cloths are fibrous and should not be used. Inspect the o-rings and look for imbedded particulates, cracks, or permanent "set", i.e. o-ring appears flattened. Replace o-rings with those types of defects. # O-rings do not need to be greased to function properly. Although vacuum grease can help with sealing characteristics, it has an extremely high potential to trap particulate matter and precipitate leaks. '''Do not use vacuum grease in the''' '''vacuum system.''' # Put the thick o-ring between the spring-loaded surface and the o-ring groove. The o-ring must not be nicked and no foreign matter should be caught between the sealing surfaces. Alcohol can be used to lubricate the o-ring to facilitate installation. # Wipe the threads and sealing surface on the cryo pump with lint-free wipes where the poppet valve screws in. # Put the small o-ring in the o-ring groove. # Rescrew on the poppet valve until it is tight so that it cannot be removed by hand. # Now another regen can be initiated. The extended purge time can be set to five minutes to shorten the length of the regen. Remember to reset the extended purge time back to 20 minutes once the regen is completed. # The pump will go through the normal regen procedure and testing. # If helium leak checking is done on the chamber or cryo pump, CTI recommends using the On-Board Central Control to set the Second Stage temperature control to 20 degrees Kelvin. This will prevent the pump from pumping the helium, and making it more detectable. Turn off the Second Stage temperature control when leak checking is complete. Cryo pumps have a finite capacity for helium and it may be necessary to do a fast regen if a lot of helium has leaked into the chamber. ====VCE 4 Bellows Replacement==== If a leak develops in the bellows of cassette, use this procedure to replace it. # Remove covers from drive assembly (underneath chamber) # disassemble platform # The top of the bellows are now exposed. It is secured to shaft by a number of screws, unscrew these. # Underneath the chamber, where the assembly screws onto it, there is a set of screws located in the inner section, unscrew these. # Pull out bellows, these are all one piece. # Clean o-rings with IPA, and install new bellows. # Secure bottom with screws, then top. Ensure bellows are not twisted. # Reverse the above process for re-assembly. # Check wafer alignment into cassette. '''VCE 4 Z-DRIVE REPLACEMENT''' # This is done when damage has occurred to leadscrew. # Remove covers off motor assembly. # at the bottom is the motor drive, underneath the lead screw is the brake. Locate the set screw and loosen it. # The platform is free to wind all the way down, with the minimum of effort. If this is not the case, then the leadscrew may be mis-aligned. This means it must be sent back to brooks. # Remove Platform assembly. # Disconnect WSO detector wires. # Place scissors lift under drive. Unscrew four retaining bolts, on other circumference, which secure the drive to the chamber. These are captured, so they will not fall out. # The drive is now free, lower it and remove. # Clean all o-ring with IPA, and reverse above process for reinstall. # Re-align robot to cassette. ====System Reset Procedure==== '''Caution: If robot is extended into a chamber or loadlock. ''''''DO NOT ''''''reset the system until robot is retracted.''' '''This is because a reset closes all slot valves and raises chucks.''' # Record memory level for the transport module computer: (bottom right corner on Wyse terminal) {|border="0" cellspacing="2" width="100%" |Transport module computer||________Mb |} # Exit the CTC program by typing Alt-X on the CTC keyboard. # Turn off the transport module techware computer. # Reset all PM module techware computers by turning them off, waiting a minimum of ten seconds then turning them back on. # Wait until the memory level on the process modules is ( 8 Megs. Login and go to the logo screen (for each module) and verify the comment "Initialization routine complete" or "Controller in Production Mode". # Turn on transport module techware computer. Once the login screen has appears login and go to the Utilities sub menu screen (press U on key board) use arrow keys to select "CPU usage" and "enter". This will bring up the % of CPU usage on the bottom right hand side of the screen next to the memory level. # Wait until the memory level goes down on the transport module techware computer to approximately the level in step 1 and the % of CPU usage are stable at between 35 and 50 % (this takes approximately 15 minutes). # Restart CTC software by double clicking on the CTC icon. ====Terminal Set up (Wyse)==== The following fields in each Menu and/or Sub Menu needs to configured as shown below. Any deviation from these configuration may cause the Wyse Terminal to response improperly. '''Note:''' {|border="2" cellspacing="0" cellpadding="4" width="43%" |align = "center"|'''All other fields remain at their default settings.''' |} Press '''Select Key (or CTRL – SCROLL LOCK) '''on the keyboard. '''Screen Menu:''' {|border="0" cellspacing="2" width="100%" |Page columns|| || ||colspan = "2"|132 |- |Page lines || || || ||24/25 |- |Page line mult.||  || ||colspan = "2"|1 |- |Number of pages|| || ||colspan = "2"|1 |- |Number of sessions|| || ||colspan = "2"|2 |- |colspan = "3"|Session display split,|| ||1 full |} '''Modes Menu:''' {|border="0" cellspacing="2" width="100%" |Received CR||  || || ||CR |- |Received LF|| || || ||LF |- |colspan = "2"|Terminal mode || || ||7BIT |- |Personality|| || || ||Wyse 350 |- |colspan = "4"| ||'''Display Menu:''' |- |colspan = "4"| ||Display Functions |} '''Sub Menu Display Function:''' {|border="0" cellspacing="2" width="100%" |Autowrap|| ||on |} '''Port Menu :''' {|border="0" cellspacing="2" width="100%" |colspan = "4"|Communications Mode||Full DPX |- |colspan = "2"|On-line/Local|| || ||On-line |- |Trace|| || || ||Both |} Port A Setting Port B Setting '''Sub menu Port A Settings''' {|border="0" cellspacing="2" width="100%" |Baud Rate to:|| || ||colspan = "2"|38,400 |- |Receive baud rate: || || ||colspan = "2"|Rec=Xmit |- |colspan = "3"|Date Bits/Stop Bits/ Parity|| ||8/ 1/ none |- |colspan = "3"|Receive Handshake || ||Xon/Xoff |- |colspan = "3"|Transmit Handshake || ||Xon/Xoff |- |Interface|| || || ||RS232C |- |Modem Control || || ||colspan = "2"|ASCII |} '''Sub Menu Port B Settings''' {|border="0" cellspacing="2" width="100%" |Baud Rate || || ||9,600 |- |colspan = "3"|Date Bits /Stop Parity Bits ||8/ 1/ none |- |Modem Control || || ||ASCII |} '''Sub Menu Session Resources''' {|border="0" cellspacing="2" width="100%" | || ||PrtA||PrtB||Buff1||Buff2 |- |Session 1|| ||host|| ||colspan = "2"|actv |- |Session 2|| ||host|| ||colspan = "2"|actv |} '''Exit Menu:''' Exit Setup and Save ====Alignment Procedures==== =====Wafer Transfer Set up===== # Vent cassette, wafer transfer module and process module(s) to be aligned. # Select desired module using ’Ctrl D’, ’*’, ’Ctrl V’ (* - insert desired module number) # Using the Select function go to screen for cassette (i.e. mntlla or mntllb) # Move cassette to desired slot by inserting number at target slot, change .mode to Goslot and .ctrl to run. # Select mnttr screen # Open appropriate cassette slot valves by changing .mode to either OpSVA or OpSVB # Change .ctrl to run and the slot opens. # Repeat for process module slot valve # The cassette and wafer transfer chamber is vented. The cassette is at the desired slot and the slot valves are open. # Select mnttr screen. # Change .stn to LA or LB depending on the cassette wanted .mode to Rotate .ctrl to Run {|border="0" cellspacing="2" width="100%" |Pick||"||picks wafer. |- |AlPlace||"||places it on aligner. (if equipped with aligner) |- |AlPick||"||aligns and picks wafer. (if equipped with aligner) |} # Using the Robot hand held CDM controller, to first move to the desired station, then to set up station alignment. (see CDM Set up Procedure) Note: Use the Hand Locate function to position wafer for more accuracy (if possible) # If wafer is moved, send the wafer back to the cassette and start the process over for the beginning. '''Note: Switch off hand held (CDM) controller if using the aligner and restart at step 11.''' # When alignment is done, do a pick and place from the station you just set up to verify the transfer. Then return the wafer back to the cassette. Now pick from the cassette or from the aligner and place at the station you have just aligned, again to verity the transfer. Switch off robot hand held (CDM) controller. # Ensure that robot arms are in chamber. Close all slot valves, and pumpdown. ====Control/Display Module (CDM) Set up Procedure==== [[Image:52132-AE(English)_105.gif|framed|none]] [[Image:52132-AE(English)_104.gif|framed|none]] [[Image:52132-AE(English)_101.gif|framed|none]] [[Image:52132-AE(English)_109.gif|framed|none]] [[Image:52132-AE(English)_189.png|thumb|none|237px]] ---- '''''Step 1. Home the Robot:''''' Select the '''Home''' button Select the '''ALL''' button Select the '''Quit''' button Definitions: '''Quit''' – Allows user to return to main menu (Home, Move, Wafer Xfer, Setup, Info, Self Test and Off/On) '''Esc''' – takes user back one previous sub – menu (All Sub menus will appear in the CDM Window.) '''CR''' – Saves last entry '''''Step 2. Move the robot to the desired position:''''' Move the robot to the desired position [[Image:52132-AE(English)_102.gif|framed|none]] [[Image:52132-AE(English)_106.gif|framed|none]] [[Image:52132-AE(English)_190.png|thumb|none|214px]] Select the''' Move''' button Enter desired Station #__. Then select (CR) to execute Ensured that robot has moved to the proper position – if not repeat Step 2 Select the '''Quit''' button [[Image:52132-AE(English)_107.gif|framed|none]] [[Image:52132-AE(English)_191.png|thumb|none|250px]] '''''Step 3. Align the Station:''''' Select the '''Setup''' button Sub menu – Setup ? Select option (2) Station by entering the #2 Sub menu Setup STN? Enter desired station # __ then select (CR) to execute Sub menu – Setup STN #Arm A Select option (2) Learn R,T,BTO by entering the #2 Sub menu – Learn R,T,BTO Select option (2) Jog by entering the #2 At this point jog the robot in the desired position using the following numeric numbers: For R. #4 & #6 For T. #7 & #9 For BTO #8 & 2 Once you’re satisfied the next step is to Store the current values. [[Image:52132-AE(English)_110.gif|framed|none]] [[Image:52132-AE(English)_108.gif|framed|none]] [[Image:52132-AE(English)_103.gif|framed|none]] [[Image:52132-AE(English)_192.png|thumb|none|352px]] Select the '''Escape''' button Sub menu – Learn R,T,BTO Select option (1) Store by entering the #1 then select (CR) to execute Select '''Escape''' button twice (2) Sub menu – Setup STN __ Select option (3) Learn Lower by entering the #3 Sub menu – Learn Lower Select option (2) Jog by entering the #2 At this point jog the robot in the desired position lower using the following numeric numbers For Lower #8 & #2 Once you’re satisfied the next step is to Store the current values. Select the '''Escape''' button Sub menu – Learn Lower Select option (1) Store by entering the #1 then select (CR) to execute Select the '''Quit''' button: When this is acceptable, do a Pick and Place from the station you just set up. Do this a couple of times to verify the transfer. Then do a Pick at the cassette and a place at the station you have just aligned. ====0 Vent and Pumpdown Procedure for CWH (CX – 7/8) Module==== 1. Turn the heat on and set the heater duty cycle to 80%. 2. Wait a minimum one hour for the chamber to heat up. # Select the mntchm screen. Enter the direct control mode. Use the MTRC section on the screen. In this section, select the .mode field and choose the vent option. To execute vent program select the .ctl field and choose the Run option. '''Note: This will regen the water pump. When the water pump is above 300 degrees K, the hi-vac valve closes and''' '''the vent valve will open.''' # Regen the cryo pump, if required, using the CTI controller. # Perform chamber maintenance. '''Pumpdown:''' 1. Prior to closing the lid clean the o-rings and seal surfaces. 2. Select the mntchm screen. Enter the direct control mode. Use the MTRC section on the screen. In this section, select the .mode field and choose the pump option. To execute pump program select the .ctl field and choose the Run option. '''Vent and Pumpdown Procedure for Cassette(s)''' Vent and pumpdown using the CTC as follows: 1. Press vent on the CTC screen. The hi-vac closes and the vent valve opens. The automatic door opens. 2. Run Pump from the CTC screen. The automatic door closes and the roughing valve opens. Vent and Pumpdown using the mntchm screen: 1. Select the mntchm screen. # Enter the direct control mode. Use the MLAC (Cassette A) or MLBC (Cassette B) section on the screen. In this section select .mode field and choose the vent option. To execute vent program select the .ctl field and choose the Run option. # Enter the direct control mode. Use the MLAC or MLBC section on the screen. In this section select .mode field and choose the pump option. To execute pump the program select the .ctl field and choose the Run option. ====Robot Arms Mounting For CX7 and CX8 CWH==== '''EQUIPMENT REQUIRED:''' # 5mm T-Handle Allen or torque wrench (torque wrench is recommended). # Brooks hand-held controller. # 9-pin communications cable for controller. # robot arms (with arm mounting jig). # clean-room gloves. # isopropyl alcohol. '''PROCEDURE:''' {|cellspacing="0" cellpadding = "10" style="border-style:solid; border-color:black; border-width:1px;" width="100%" |:'''WAFER TRANSPORT MODULE (WTM) CONDITIONS:''' |} # '''''vent''''' chamber. # '''''lift''''' WTM '''''lid'''''. {|cellspacing="0" cellpadding = "10" style="border-style:solid; border-color:black; border-width:1px;" width="100%" |'''MOUNT ROBOT ARMS:''' |} # If not previously installed proceed with following steps of procedure to mount the Robot Arms. # Mount the arm mounting jig to the robot arm to insure no movement of the arms during installation. # At the motor assembly rotate to align the drive shaft guide pins to the Robot arm guide holes. # Locate the Robot arm assembly onto the motor drive shaft pins ensuring that the alignment pins are fully seated and the twelve inner and outer bolt holes are aligned with the drive shaft # Insert and tighten the arm mounting bolts until the lock washers are fully seated into the arm. Secure bolts to 25 in / lb. in a cross tightening pattern. If torque wrench is not available tighten bolts Ό turn after seating. # Remove the arm mounting jig. '''ESTABLISH COMMUNICATIONS:''' # '''''connect''''' 9-pin communications '''''cable''''' into '''''serial port CDM '''''on robot. # '''''turn on''''' Brooks hand-held '''''controller''''' by '''''pressing''''' the '''''ON/OFF key''''' (this will '''''establish control''''' of robot). # '''''confirm''''' '''''Main Display''''' readout is as follows: '''<<CHOOSE FUNCTION FROM LEFT COLUM KEYS>>'''. {|cellspacing="0" cellpadding = "10" style="border-style:solid; border-color:black; border-width:1px;" width="100%" |'''HOME THE ROBOT:''' |} # '''''press HOME''''' key. # Response from the CDM will be "GET CONTROL FOR THE CDM?" – '''Answer Yes / CR button'''. # '''''press ALL''''' key (this will home the robot)'''*'''. '''Caution: Robot will move on this step! Ensure hands and objects are clear of the Robot arm rotational path.''' # '''''press ESCAPE 1 time''''' to bring you back to '''''Main Display'''''. # '''''Verify''''' that the '''''end effector''''''''**''' is '''''pointing to the back side of the CWH''' ''(between Stations 4 & 5 for CX-8 or 3 & 4 for CX-7) when you mount Robot Arms. ''' HOMING THE ROBOT PROVIDES AN ABSOLUTE REFERENCE POINT.''' {|cellspacing="0" cellpadding = "10" style="border-style:solid; border-color:black; border-width:1px;" width="100%" |'''** END EFFECTOR: the mechanical device at the end of the robot arms that actually supports the wafer.''' |- |:'''SET STATION LOCATIONS:''' |} # '''''answer'' ''''''STATIONS''' to the following '''''question'''''''': <<SETUP?>>'''. # '''''answer''''' the following '''''question''''' by pressing the '''NUMBER (#)''' of the '''STATION''' you want to setup: '''<<SETUP STATION __?>>'''. # '''''press''''' the '''CR/YES''' key to go to the '''''Station options'''''. # '''''select'' ''''''#1: ASSIGN LOCATIONS'''. # '''''press''''' the '''T''' '''''(theta)''''' key. # '''''enter''''' number of '''''degrees''''' '''''for''''' the corresponding '''''Station'''''. # '''''use''''' the following '''''chart 1 '''''(Pg. 3 of 5) as a reference for CX-8 configuration / '''''chart 2''''' for CX-7: {|class="wikitable" border="1" cellpadding="2" cellspacing="2" |+'''Chart 1''' |- !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|MODULE !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|STATION # !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|DEGREE ASSIGNMENT |- |CASS1||1||210° |- |PM1||2||253.5° |- |PM2||3||296.5° |- |PM3||4||338.75° |- |PM4||5||21.25° |- |PM5||6||63.75 |- |PM6||7||106.25° |- |CASS2||8||150° |} '''Chart 1''' {|class="wikitable" border="1" cellpadding="2" cellspacing="2" |+'''Chart 2''' !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|MODULE !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|STATION # !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|DEGREE ASSIGNMENT |- |CE1||1||210.5° |- |PM1||2||262° |- |PM2||3||313.5° |- |PM3||4||5.0° |- |PM4||5||56.5° |- |PM5||6||108° |- |CASS2||7||159.5° |} ALL STATIONS MUST BE ENTERED REGARDLESS OF WHETHER OR NOT THERE IS A MODULE PRESENT.
            1. Press the '''"CR/YES"''' key to save "T" entry.
            2. Assign all station locations.
            3. Pressthe''' "QUIT" '''key.
            4. "Home" the robot.

            VERIFY STATION LOCATIONS

            1. Press the '''"MOVE"''' key from the Main Display screen.
            2. Answer '''"TO STATION"''' to the following question:<<MOVE ARM A?<<.
            3. Answer the following question by pressing the # of the '''"STATION"''' you want to move to : <<MOVE ARM A TO STATION__?<<.
            4. Press the''' "CR/YES"''' key to move the Robot Arms.
            5. Confirm that the Robot Arms are moving to the correct station assignment.
            6. Press the ESCAPE key 1 time to enter a new station #.
            7. Move the Robot Arms to all stations in order to complete verification.
            8. Press the '''"QUIT"''' key when you are done.

            Release Control of the Robot

            1. Press the '''"ON/OFF"''' key.
            2. Answer'''"YES"''' to the following question: <<ARE YOU SURE YOU WANT TO RELEASE CONTROL?>>:.

            Clean Robot Arms and WTM Chamber

            1. Use the isopropyl alcohol.
            2. Remove all marks and blemishes.

            Robot Retract Calibration Procedure (Physical I/O)

            1. Make sure you are in the WTM Techware screen.
            2. Go to the '''LOGO''' screen and '''"STOP"''' any programs that are running.
            3. Get out of Pal by pressing '''"ESC"''' twice, the computer will ask you if you want to exit Pal answer. '''"YES"'''.
            4. As the Techware is rebooting, you must stop the countdown before it reaches 0 by pressing any key on the key board.
            5. For user: Type in user name For password: Type in appropriate password.
            At this point you should be in the PAL Utilities screen.
            1. Select serial port communications.
            2. Select Port T3 for communications.
            3. Help menu will appear, then type in '''~p.'''
            4. The following port line parameters should be used:
            :{|border="0" cellspacing="2" |Baud rate = ||9600 |- |Data bits = ||8 |- |Stop bits = ||1 |- |Parity = ||none |}
            1. Enter '''"U"''' for update
            2. Enter '''"Q"''' for quit.
            3. Type – '''Reset'''
            4. For MAG 6 only , MAG 7 Robot Proceed to step 13, Type –''' MAP ARM_R RETRACT_PIN LOW TO DIGITAL_OUT 0x10'''. This will allow the assignment of the I/O point to the WTM Techware digital input to be a logic level low to indicate the retraction of the Robot Arm.
            5. Press – '''Enter'''
            6. Type – '''RQ Arms All'''. This will display configuration information with last value being RETANG (Retract arm angle).
            7. Type –''' Set Arms Retang XXX.XXX'''
            :{| |X= New value for retract (measured in degrees) |- |CX8 Retract Arm Angle = 240.000 |- |CX7 Retract Arm Angle = 180.000 |}
            1. Type – '''Store Arms All'''
            2. Type –''' Reset'''
            3. Type - '''~ Q'''. This command returns you to the /dd/tm.pal prompt.

            Configuration of the VCE-4 / VCE-6 Cassette Elevator

            1. From the /dd/tm.pal prompt Type – Portc /t7
            2. Help menu will appear, then type in '''~p'''
            3. The following port line parameters should be used:
            {| |Baud rate = ||9600 |- |Data bits = ||7 |- |Stop bits = ||1 |- |Parity = ||Even |}
            1. Enter '''U''' for update
            2. Enter '''Q''' for quit.
            3. Enter '''~E''' to turn Portc echo on.
            4. Type – '''S,ER'''
            5. Type – '''R,ER''' - Response from the Cassette Elevator should be '''X,ER,OK – '''If not repeat step 7 again.
            6. To set the configuration string information type –
            '''S,CF,NS,12 ''' ( NS = Number of slots for cassette holder). '''S,CF,PT,3800''' (PT= Pitch , 3800 is setting for up to 5 inch material , 12&13 Slot cassettes , 1880 for Silicon 6"& 25 slot cassette and 2500 for Silicon 8"substrate materials). '''S,CF,CT,9150 '''(Cassette type offset – generally set to 9150 , others are listed in section 7 of the Brooks VCE4 cassette elevator users manual and may be used to determine optimum value). '''R,CF''' – Request configuration – Response should be –'''X,CF,SMF,NS12, PT3800,CT9150,LM10000 – '''This will vary dependent on the information set in the configuration string input. Record this information in the Daily System log for future use as required.
            1. Type '''– P,CF, NS '''( This will store the number of slots configuration information).
            2. Type '''– P,CF, CT '''( This will store the cassette offset configuration information).
            3. Type '''– P,CF, PT '''( This will store the pitch configuration information).
            4. Type '''– P,CF, LM '''(This will store the travel length configuration information).
            5. To set find bias type – '''S,FB,10000 '''(This is the default value for find bias. If mapping of wafers has errors this value may need to be adjusted. Follow instructions for using the standard command "Determine find bias" listed in section 8 of the Brooks VCE4 cassette elevator users manual to determine optimum findbias.)
            6. Type – P,FB (To store Find bias information )
            7. Type - '''~ Q'''
            8. Reboot the WTM Techware computer.
            ====Calibration====

            Calibrate CTC Touchscreen – Window NT

            The following procedure will allow to calibrate the touch screen on the CTC with Window NT operating system only. Keyboard and Mouse required'''
            1. Select and press the''' Window Key''' on the keyboard.
            2. Select the '''Run '''from the pop up menu that appears and enter.
            3. On the screen that appears type in the command '''Control''' and enter. (this will bring up Computer ''Control Panel'')
            4. From the Computer ''Control Panel'' choose the '''Touchscreen Icon''' and double click.
            Depending on the monitor and computer type your system may not have an icon called Touchscreen, but should have something similar.
            1. On the ''Elo Touchscreen'' Window select the '''Calibrate''' option and follow the on screen instructions in the ''Calibrate'' Window. ("Touch the target from a position of normal use")
            Touch the computer generated targets only. Failure to comply may cause will cause improper touchscreen operations.
            1. After completing the above task the computer will ask you to verify the calibration, follow the on screen instructions in ''Check Calibration'' Window.
            2. Once you are satisfied touch the '''Yes '''option in ''Check Calibration'' Window.
            3. Exit by closing all open windows until you’re at a normal CTC operating screen.

            Convectron Gauge Calibration

            1. Link the monitor to the desired process module Techware computer.
            2. Select the '''Logo''' screen, and run the '''Vent''' batch. Wait for the vent program to complete. If Multi step – select service mode from TI screen and run Vent 1 from the PGC. Cmd field.
            3. Remove the blank off from the leak checking port of the process module. This will ensure that the chamber is not pressurized.
            4. Using a multimeter, measure the DC voltage from the monitor analog to common (on the GP275.) The voltage should be equal to 5.534 Vdc. This can be adjusted using the Adjust/Atmosphere pot. Verify display on Techware that the Convectron reads 760 ± 10 torr.
            5. Adjust the Adjust/Setpoint pot so that the Relay On LED just turns off.
            6. Replace the blank off.
            7. Run the '''Mesc.XX '''batch. Wait for the status line to display "Initialization Complete." Multi step will read "Module in production mode"
            8. Using a multimeter, measure the DC voltage from the monitor analog to common. The voltage should be equal to .375 Vdc. This can be adjusted using the Adjust/Vacuum pot.

            Mass Flow Controller

        3. Link the monitor to the desired process module Techware computer.
        4. Select the '''DC.Status, RF.Status''', or '''Pumpdown''' screen.
        5. Ensure that the process gas isolation valve is closed.
        6. Note the displayed process gas flow. If it is not equal to 0.0 sccm adjust the zero pot located on the side of the mass flow controller so that the flow reading is equal to 0.0 sccm.
        7. Repeat for all of the module’s mass flow controllers.

        Water Flow Meter

        Adjustment of LED

        With the unit installed in the line and power supplied, complete the following steps to calibrate the sensor. A small flat-blade screwdriver is all that is required.
        1. Adjust the water flow in the line to the rate desired.
        2. Insert screwdriver into the opening on backside of the housing and fit blade into the potentiometer adjustment screw inside.
        3. If the LED is not illuminated, slowly turn screwdriver counter-clockwise and stop as soon as LED illuminates.
        4. If LED is illuminated, turn screwdriver clockwise until led light goes out.
        5. Then, slowly turn screwdriver counter-clockwise and stop as soon as LED illuminates.

        VAT Throttling Gate Valve Setup Procedure

        Program the Controller

        1. Get the VAT TEST BOX
          1. Open top cover of unit
          2. Set the unit to 9600 baud by closing dip switches 2 & 3 and the rest open. At this point please label the unit "set to 9600 baud" on rear panel.
          3. Close top cover of unit.
        2. Connect VAT controller to the HI.VAC valve with VAT cable.
        3. Using Test box, set the controls to local by holding the '''LOCAL''' button for 2 sec.
        4. Simultaneously press '''LEARN''' and '''ZERO''' buttons for 2 sec. to go into sensor set up.
            Use the '''⇑''' and '''⇓''' to toggle parameters Use '''F1''' to go to next parameter Press''' F2''' to exit
          {|border="2" cellspacing="0" cellpadding="4" width="39%" |align = "center"|'''Setup voltage range'''||align = "center"|0 – 10 volts |- |align = "center"|'''Display range'''||align = "center"|0 – 100.0 volts |- |align = "center"|'''Display'''||align = "center"|m Torr |- |align = "center"|'''Display Range'''||align = "center"|Lin |- |align = "center"|'''Sensor Type'''||align = "center"|Torr |- |align = "center"|'''Zero adjust'''||align = "center"|ENABLE |}
        5. Turn off the unit using rear panel switch ---- wait 1 min. (for internal capacitor to discharge).
        6. Disconnect cables.

        No VAT Test Box Available

        1. Login to operating system.
        2. Open a port c session: '''Note: Login and opening a session will vary; dependent upon software release.''' {|border="0" cellspacing="2" |For '''GMR''' or '''Multi-Step PVD''' Software Product, type or select:||'''portc / v1'''. |- |For '''PVD''' Software Product, type or select:||'''portc / t4'''. |}
        3. Simultaneously press: '''SHIFT''', '''~''', and '''P''' to set communications parameters.
        4. Set communications parameters according to chart 2. {|border="1" cellspacing="0" cellpadding="4" width="39%" |align = "center"|'''Parameter'''||align = "center"|'''Value''' |- |align = "center"|'''Baud Rate'''||align = "center"|9600 |- |align = "center"|'''Parity'''||align = "center"|even |- |align = "center"|'''Data Bits'''||align = "center"|7 |- |align = "center"|'''Stop Bits'''||align = "center"|1 |}
        5. Press "U" to Update communications parameters.
        6. The response displayed will be: '''>>Connected'''
        7. Repeat step #3 to double check parameters.
        8. Press "Q" to quit.
        9. Simultaneously press: '''SHIFT''', '''~''', and '''E''' to set Echo on
        10. Type U:01 (case sensitive).
        11. Press '''ENTER''' then the '''down (''' arrow key.
        12. The response from Vat Controller should be: '''U: '''(This indicates that local control is established).
        13. Type '''s:1363010 '''(case sensitive).
        14. Press '''ENTER''' then the '''down (''' arrow key.
        15. The response from Vat Controller should be: '''s: '''(This indicates that setup parameters are entered).
        16. Simultaneously press: '''SHIFT''', '''~''', and '''Q''' to quit portc session.
        17. Reboot module.

        VAT Valve Set Up Procedure

        1. Rough out Process chamber to 200 mtorr.
        2. Using VATPM51 screen (on the process module controller terminal) Auto size Adjust by highlighting VAT SIZE ADJ. and initiate the command by pressing "Do It Now". You should see the valve open slowly.
        3. Turn '''ON''' the Ion gauge filament.
        4. Pump out the chamber to 5.0 E-7 Torr then '''OPEN''' capacitance manometer ISO valve
        For steps 5&6 both must be on for 24 hours to be stable
        1. Zero Capacitance manometer.
        2. Zero Gas flow controllers.
        3. Zero VAT controller by highlighting '''VAT AUTO ZERO''' and then "'''Do it''' '''now'''".
        4. Turn '''OFF''' the Ion gage filament.
        5. Set the gas flow to''' 90 sccm'''.
        6. Set VatPrsSetpt to '''40 m Torr'''.
        7. Set Vat Auto Learn to''' 100%'''.
        VatCommStat will go off line until Auto Learn is complete.
        1. When the controller is back ONLINE set "Vat PrsSet pt" to 10 mTorr, 15 mTorr, 40 mTorr, 100 mTorr and then 6 mTorr. Unit should respond quickly and accurately usually within 2 sec.
        2. Shut off Gas Isolation Valve
        3. Set the vat pressure to 0 mTorr
        4. Open Hi Vac by using Vat QuickMV Highlighting "OPEN"
        Unit is in the pressure mode when setting pressure – Unit is in the position mode when using QuickMv. {|border="0" cellspacing="2" width="100%" |+Explanations of VATPM51 Techware screen |- |'''VAT PreSetpt''' |Process gas pressure set point |- |'''VAT Posn Setpt''' |When in position mode set point |- |'''VAT True posn''' |Actual valve position (0 %= closed 100%=open) |- |'''VAT True press''' |Actual chamber pressure |- |'''VAT Posn Speed''' |Speed at which the valve moves |- |'''VAT Comm STAT''' |Communication status (ONLINE / OFFLINE''')''' |- |'''VAT QuickMv''' |Quick open / close |- |'''VAT Auto Zero''' |Auto Zero function |- |'''VAT Size Adj'''. |Auto size function |- |'''VAT op mode''' |Operation mode (Remote / Local) |- |'''VAT ctrl mode''' |control mode (position / pressure) |} [[Image:52132-AE(English)_193.png|thumb|none|576px]]

        Setting Calibration Requirement for Recipes

        After performing specific maintenance activities a forced calibration of the affected module must be performed. In order for the calibration to be done properly (i.e. encompass all appropriate layers) each recipe, master and layer, must be reset (set red in OCS). This must be done manually, or if present by selecting the "''force calibration''" or equivalent option in the OCS maintenance screen or from resource viewer. Should personnel not be familiar with manual resetting of the recipes a process technician or cell director should be contacted for assistance.

        The following activities require forcing calibration:
        • Any System power failure or recovery
        • Any work performed on deposition or etch power supplies (magnetron, chuck, or etch cathode)
        • Any work performed on a magnetron (swap, cabling, leveling)
        • Any work performed on a VAT valve controller
        {|width="780" |valign="top"|Setting Recipe Status Procedure |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/OCSTargetCalibration.doc | OCS Target Calibration Reset]] |}

        ENI Matching Network

        Equipment Required

        [[image:SerialCable.PNG|480 px|border]]

        Applicable Documents

        • MW-5D-01 (MW-10D; MW-25D ) AUTOMATIC MATCHING NETWORK PRODUCT MANUAL

        Procedure

        1. Verify that process module is in a process state and confirm the following conditions:
          • The module is under high vacuum.
          • Chuck and shutter are operational.
          • There are substrate table, shields, and a dummy wafer inside the process chamber.
          • All the RF power supplies and matching networks that use serial interface are "online".
        2. Select any of the process screens ( e.g. '''Status''' screen ) on Techware terminal and perform the following:
          • Move '''Chuck''' to 1.3 inch for the bias then close '''Shutter''' (if there is one).
          • Process deposition height for target
          • Turn off ion gauge '''Filament'''.
          • Open '''ISO valve''' and set '''Flow''' to 95 sccm.
          • Change pressure to 50 mTorr by setting '''VatPreSetpt'''. On the Vatpm.51 Screen.
        Depending on software as well as hardware incorporated in the process module the above step may require using different screens and/or channels.
        1. Switch to '''bias.rf''' or '''target.rf''' screen depending on which matching network is to be set up.
        2. Change '''Power Setpoint''' to 50 W (100 W for target power supply).
        3. Make sure the matching network '''Control''' is '''Auto''', '''Interlock''' is '''On,''' and the power supply is in remote mode.
        4. Turn '''RF Status''' on. If plasma does not start in 5 sec turn '''Plasma Starter''' on for a few seconds.
        Opening shutter helps to start plasma sometimes. If all attempts to start plasma fail it usually indicates that there is a short circuit between RF output terminal of the matching network and ground. It is essential to find and remove the short to proceed with the setup.
        1. Once plasma started change pressure to 6mTorr (15 mTorr for target). Make sure '''Bias Voltage''' is stable and '''Reflected''' '''Power''' is not higher than 2 W. If these conditions are not met perform a "preliminary" calibration of the matching network at 50 or 100 W as described below in paragraphs 3.9 – 3.18.
        Target bias voltage is usually lower then 100 V for oxide targets or higher then 200 V for metallic targets. Substrate bias voltage stabilizes at 80 – 150 V.
        1. Capacitor C1 and C2 values should differ by at least 10% from their extremes (0 and 100%). If this is not true, turn off circuit breaker on RF power supply and add or remove a padded capacitor to C1 or C2 as described in Appendix 4 of matching network product manual.
        2. Increase RF power to 600 W (800 W for target) going in increments of 100 – 200 W.
        3. If reflected power becomes unstable or significantly higher (over 1% of the set power) proceed to the next paragraph for "preliminary" calibration.
        4. Should plasma cease to exist, start over from step 7 and use smaller increments to ramp up RF power.
        5. Switch matching network to manual mode.
        6. Change port B baud rate of Techware terminal to 9600 Baud / none Parity / 8 Data Bits / 1 Stop Bits. This is done by selecting the '''Select''' key on the keyboard then pressing the "P" key.
        7. Now select Port B option by moving the cursor down and selecting the<enter> key. To change the baud rate press the <enter>key until 9600 is set.
        8. Now follow the instruction on the screen to exit the sub menu. Once out of the sub menu, press "E" key and exit set up.
        9. Disconnect terminal cable and RS232 cable (port 5 for substrate or port 6 for target Port 7 for T2 Ultra) from Techware and connect them together using adapter cable.
        To switch between Port A and Port B sessions press CTRL End on keyboard. If Techware terminal connected to the process module via EAZY switch box, a separate terminal cable required finishing setup of the matching network.
        1. Type '''IDE0''' (letter case is not important) to begin communication session with the matching network. Matching network responds by displaying '''[00]''' code.
        2. Hold down ENTER key until Techware screen clears.
        3. Type '''ADJ''' and follow instructions on the screen to bring reflected power down to 0 W. If this task cannot be accomplished because capacitor C1 or C2 reaches its extreme value during adjustment, refer to the second paragraph Note above.
        4. Type''' KEY1234''' (this is a password for accessing a matching network calibration menu).
        5. Type '''CAL4''' and follow instructions on the screen to perform phase and magnitude calibration of the matching network.(Press the 1 option)
        6. Store current values of C1 and C2 under presets 0 and 2 using commands '''STO0''' <ENTER>,''' STO1''' <ENTER> '''STO2''' <ENTER>.
        7. Store these values of C1 and C2 under preset F by typing '''STOF''' <ENTER>. Preset F is used as a point of recovery if one of the capacitors reaches its extreme value during tune-in process.
        8. Toggle matching network into auto mode with command '''TAM'''. Verify that reflected power stays at or below 1% of the set power. If reflected power is too high repeat step 3.15.
        Some matching networks tune in too slowly or hunt around the tuning point. This means that motor speed and/or dead bands have to be re-calibrated. Use command CAL to view calibration menu screen. Make selection and follow instructions on the screen. For online help type HEL. For more information refer to matching network manual.'''
        1. Save new calibration parameters using '''CALF '''command.
        2. Disconnect the adapter cable; connect terminal cable and RS232 cable back to Techware.
        3. Turn '''RF Status''' off from the Techware screen.
        4. Change '''Power Setpoint''' to 600 W (800 W for target).Verify that matching network takes less than 10 sec to tune in and that reflected power stabilizes at 1% or less of set power. (Otherwise refer to paragraph's 3.18 Note to change calibration settings.)
        5. Turn '''RF Status''' off. Select '''pumpdown''' screen; open '''Hi Vac''' valve, close '''ISO Valve''' and turn ion gauge '''Filament''' on.

        Phase & Magnitude for RFPP Generators

        Phase and magnitude calibration may be necessary if the matching network has been replaced or if the reflected power is greater than 1% of the forward power. The RFPP Generator Control Panel is located in the control cabinet and is shown as part of the control cabinet figures in Section 1 of this manual. PHASE AND MAGNITUDE CALIBRATION MUST BE PERFORMED WITH A PLASMA IGNITED AND AT FULL PROCESS POWER.
        1. Ensure that plasma is established at full operating power and tuned to within five watts reflected power.
        2. If tuning is required, perform the following sub steps.
        3. Place matching network controller into MAN (manual) mode for both the LOAD and TUNE capacitors by setting the AUTO/MAN/REM switch to MAN.
        IF YOU ARE INEXPERIENCE IN ADJUSTING THE CAPACITORS DESCRIBED IN THE FOLLOWING STEP, LOWER THE POWER TO PRACTICE TUNING. ONCE YOU HAVE LEARNED TO ADJUST THE CAPACITORS AT REDUCED POWER, RAISE THE POWER AND READJUST THE CAPACITORS.
        1. Observe the meters for a power indication and tune the capacitor by quickly tapping the LOAD and TUNE adjustments switches (these switches are spring loaded and labeled + and -) to obtain an acceptable reflected power level.
        2. If any of the LIMIT LEDS (labeled – LIMIT and + LIMIT) light, the system is not properly tuned. Correct the tune problem with the tune switches before continuing with these procedures.
        3. Ensure that the matching network controller is set to the MAN (manual) mode for both the LOAD and TUNE capacitors (AUTO/MAN/REM switches set to MAN).
        4. Temporarily remove the coax cable from J3 on the rear of the matching network and connect a voltmeter between J3 and ground.
        5. Adjust the MAGNITUDE ZERO potentiometer for 0 +/- 1.0 millivolt DC. Then remove the voltmeter and reconnect J3 to the matching network.
        6. Temporarily remove the coax cable from J2 on the rear of the matching network and connect a voltmeter between J2 and ground.
        7. Adjust the MAGNITUDE ZERO potentiometer for 0 +/- 1.0 millivolt DC. Then remove the voltmeter and reconnect J2 to the matching network.
        8. Repeat steps 3 through 6 to verify voltages of 0 +/- 1.0 millivolt DC. (This step is required since there are some interactions between the adjustments in these steps.)
        9. Set the LOAD AUTO/MAN/REMOTE switch and TUNE AUTO/MAN/REMOTE switches to AUTO.
        10. Then, observe the meters for an oscillation. If an oscillation is observed, perform the following substeps.
        11. Alternately set the LOAD and TUNE AUTO/MAN/REMOTE switches (one at a time) to MAN and determine which is oscillating.
        12. Refer to the RFPP matching network controller manual and adjust the GAIN with the adjustment located on the rear of the matching network.
        13. The reflected power will drift up to about 20 watts before the matching network will start to tune automatically. If any problems persist; contact the CVC Field Service Department for assistance.

        PP Power Supply DC Bias Voltage Probe

        Equipment Required

        None

        Applicable Documents

        • RFPP DOC# 21-10483-901 RF POWER SUPPLY OPERATOR’S MANUAL 1993

        Procedure

        The term, ''RF Power Supply'', denotes the large stand alone power supply. To turn the supply off and on, use the breaker on the back of the supply. The term, ''RFPP Control Panel'', denotes the LED panel in the Process Module Control Rack.
        1. Turn OFF the RF Power Supply.
        2. Disconnect serial communication cable from RF Power Supply.
        3. Turn the RF Power Supply on and press the white POWER On/Off button on the RFPP Control Panel.
        4. If EXT is flashing on the RFPP Control Panel, make sure Techware channel INTERLOCK is on, and the water is on the system.
        5. Press the <Program> button, Analog is displayed, and then press the (⇒) three times so that the following is displayed: ''Polarity''.
        6. Use the up/down adjust keys to adjust the Polarity to ''Positive''.
        7. Press the <Program> button again to exit.
        8. Press the <Program> button, then the <Option> button three times so that ''Max. power'' is displayed, then press the (⇒) fourteen times so that the following is displayed: ''Probe Constant = XXX''.
        9. Use the up/down adjust keys to adjust the Probe Constant to 1100. Press the <Program> button again to exit.
        10. When complete, turn the RF Power Supply OFF. Reattach the Serial communication cable to the back of the RF Power Supply. Turn the RF Power Supply on and press the white POWER On/Off button on the RFPP Control Panel.
        11. The DC Bias Probe is now calibrated and ready to run process.

        Gas Bottle Change Procedure

        Overview

        This procedure outlines the steps necessary to complete a process gas bottle change on PVD1, 2, 3, 4, 5, 6, 7, LAM1, ADD1 and ADD2 Sputtering System. Refer to the photo/illustration below.
        Warning limit <300> 250 (production can proceed however an upcall in RV is needed to highlight bottle change is needed soon). Production stop limit <250 (current run can complete, then tool needs to be placed into GB PM to change bottle).

        Tools

        To complete this procedure you will need the following tools:
        • Large Adjustable Wrench
        • Leak Detector
        • Helium Gas Cylinder
        • PVD / ADD Gas Bottle Change Checklist

        Supplies

        To complete this procedure you will need the following supplies:
        • Replacement Gas Bottle
        • Gas Cylinder Cart
        • IPA
        • SS-4 VCR gaskets
        • Clean Wipes
        • Snoop
        Process gases are stored under high pressure. Never transfer a process gas Cylinder without the use of a Cylinder cart and valve safety cover.

        Preparation and RV Acknowledgement

        The PVD / ADD Sputtering system is equipped with multiple Process Gas cylinders. This procedure apply to any of the gas bottles used on this system.
        1. Place System Down as '''PMOPDOWN''' in Resource Viewer.
        2. Select '''Event ID''' as '''GB-Gas Bottle''' and '''PMACK''' to start Scheduled PM.

        Preparation and Obtaining New Process Gas Cylinder

        Read this procedure through completely before starting. If you have any questions about the material presented here contact your Department Coordinator, Manager, or the Equipment Engineer.
        All of the process gases used on the PVD / ADD system are supplied by high-pressure bottles. Once the gases in the cylinder reach a minimum level, the bottles are replaced. This procedure covers the replacement of those bottles. The first step in replacing the gas bottle is to prepare the system. To prepare the system:
        1. Record used process gas pressure, type and serial number of bottle to be changed on the checklist.
        2. Obtain new applicable process gas bottle from Gas Cylinder Room. (The Gas Cylinder room is located in building 6, next to the Target Room).
        3. Confirm and record new applicable process gas cylinder information on the checklist:
          • Cylinder I.D.
          • Gas Type
          • Purity
          • Mixture (If Applicable)
          • Safety Seal
          • Tag/Labeling
        4. Have a Senior Maintenance Technician, Lead Technician, Shift Manager, Tool Owner or Equipment Engineer verify and sign-off on checklist.
        Utilize Process Gas Cylinder Cart with Secure Chain/Strap when transferring and placing to FAB area.
        1. Transfer the New Process Gas Cylinder to the FAB pass-through located in Building 6 across from the Gas Cylinder Room.
        2. Transfer the new process gas cylinder to the applicable tool gas panel / distribution area.

        Removal of Used Process Gas Cylinder

        Once the system is ready, you can proceed with removing the used cylinder. To remove the used cylinder:
        1. Close the gas bottle main shut off valve on the Process Gas cylinder you are replacing.
        2. Close the system delivery manual isolation valve above the Process Gas cylinder you are replacing.
        3. Slowly loosen the gland fitting on the Process Gas cylinder you are replacing.
        It is normal for some trapped gas to be released when removing this fitting. The gas line is under high pressure. Open the fitting slowly to avoid injuries and raising any debris in the gas cabinet.
        1. Remove the Pigtail Line / Connector from the gas bottle main shut off valve.
        2. Place a safety cap over the gas bottle main shut off valve.
        3. Remove the straps securing the Process Gas cylinder to the rack.
        4. Place empty Process Gas cylinder on bottle cart and secure it to the cart.
        5. Identify the Used Process Gas cylinder as '''"EMPTY" '''on the traveler card

        Installing the New Process Gas Cylinder

        With the used gas cylinder removed, you can now install the new gas bottle. To install a new Process Gas cylinder:
        1. Secure the new Process Gas cylinder to the Rack using the Chains / Strap.
        2. Record new gas bottle information on the Gas Bottle Change Logsheet that is attached to the gas bottle pigtail on the bottle you are replacing. Have Lead Tech, Manager, TO, EE or another certified Tech to verify and sign off the Logsheet.
        3. Remove Safety Cap from the bottle main shut off valve and remove Safety Seal. Inspect threads and nipple sealing surface for any damage. Tag and return bottle if damage is found.
        If the Safety Seal is not present, DO NOT use this bottle, return it and obtain a new bottle.
        1. Apply small amount of Snoop around the neck connector and main valve to leak check the high pressure of the bottle prior to installation of the gas line.
        2. If signs of a leak and/or bubbles from the Snoop, tag the bottle, notify Doug Lucken (408) 887-0560 and obtain a new Process Gas cylinder.
        3. Clean and inspect the Main Valve Connector and Pigtail Connector with IPA and a Clean wipe. Insure there are no scratches on the sealing surfaces, repair or replace as needed.
        4. Align the gas bottle main shut off valve opening with the Pigtail / Connector.
        5. Connect Pigtail Line to Main Valve Connector, tighten.
        Do Not open the manual shut off valve on the Process Gas bottle at this time.
        1. Connect a leak detector to the leak test shutoff valve associated with the process gas cylinder you are servicing.
        2. Open the leak test manual isolation valve. Startup (pumpdown) leak detector and leak check the connection to the new Process Gas cylinder.
        3. Leak Check the Process Gas cylinder connections that were exposed to ATM.
        4. Once the connection is leak tight, close the leak test manual isolation valve and remove the leak detector. With a new VCR gasket, secure and tightened the VCR plug or cap.
        5. Using one of the Etch chambers, record the chamber pressure. On the Techware, change SPVD module to Service Mode.
        6. Close Hi-vac valve and turn off the ion gauge.
          • If a MFC by-pass valve is available, close both manual valves before and after the MFC then open the bypass valve slowly. Once by-pass valve is open, pumpdown the chamber and turn on the ion gauge. Evacuate the line until the chamber pressure is 2.0 X 10-7 or better. If pressure is not met, leak check as necessary.
          • If a bypass valve is not available, go to the next step.
        7. Pumpdown the gas line (with the system delivery manual isolation valve still closed) thru the chamber by flowing 100 sccm or to the maximum allowable. Allow it to evacuate the gas line. Chamber pressure should be 2.0X 10-7 or better. MFC flow should be zero.
        8. Once pressure is met, leak check the gas lines and repair any leak if found. Leak check must be done with MFC set to maximum flow and with the chamber isolation valve open. Leak check includes the MFC itself.
        It is necessary to adjust the pressure regulator wide open (clockwise) for faster pumpdown time through the regulator.
        1. Once the gas lines are leak tight, close MFC bypass valve if equipped and/or turn off gas flow, open both manual valves before and after the MFC. Change SPVD module back to Process Mode. Reset SPVD through CTC computer.
        Remember to back out (counter clockwise) the regulator to the point there is no tension on the knob before opening the gas bottle main valve.
        1. Open the gas bottle main shutoff valve on the bottle.
        2. Open system delivery manual isolation valve and adjust the delivery pressure to the proper PSI as necessary (Spec: 20-25psi).
        3. Record the pressure of the new Process Gas cylinder on the log sheet and checklist.
        4. Close the maintenance call on RV and note all activities in Forum Notes.
        5. Notify Mfg to run all necessary calibrations for Etch and Deposition process.
        6. Return the leak detector and helium bottle to their designated holding areas.
        7. Return used/empty gas bottle to the gas cylinder room, securely strapped to the designated area for empty gas bottles.
        [[Image:52132-AE(English)_199.jpg|thumb|none|642px|PVD1 and PVD2 Illustrated]] PVD3 and PVD4 Do Not have leak check ports, you must leak check through the SPVD module. {| |[[Image:52132-AE(English)_200.jpg|thumb|none|306px|PVD5, PVD6, PVD7, LAM1, ADD1 and ADD2]] |[[Image:52132-AE(English)_201.jpg|thumb|none|222px|Etch Module Gas Box MFC Isolation and Bypass Valve]] |}

        Target Tracking Procedure

        Always refer to the online web-TRS for up to date target information. The TRS can be found on many OCS computers through out the fab at the following locations:
        :[[Image:52132-AE(English)_202_282.png|framed|none]] The WEBTRS has been installed on the OCS computers under "Favorites" in Window Explorer. For direct access go to the following URL:
        [http://10.81.20.42/trsweb/Default.aspx http://10.81.20.42/trsweb/Default.aspx]

        Magnet Array Height Measurement Procedure

        PVD Magnet Array Height Adjustment Procedure

        {| |
        1. Ensure the retaining ring is bolted down to chamber.
        2. Check magnet array for level.
          1. Make height measurement as in Figure 1.
          2. Use one spot on the magnet array plate and rotate to 90 degree to make 4 measurements. All 4 measurement should be within ± 0.005".
          3. If not in spec. use the 4 leveling screws in Picture 2 with the Arrow A to level within spec.
        3. Adjust array height.
          1. The height specification list on the table below. Loosen up two M5 screw with the Arrow B.
          2. Turn the height adjust nut CCW from the top view to lower the magnet array. The CW turn raises magnet array from the target backing plate.
          3. Ensure the Jam nut is tightened when completed adjustment.
          4. When raising magnet array height, adjust sensor to prevent flag damage the tip of the sensor.
        |[[Image:52132-AE(English)_204.jpg|thumb|none|300px|Figure 2: Adjusting Magnet Height]] |} Magnet to backing plate gap is 1mm nominal. Chart below is used as reference from magnet backing plate. {|border="2" cellspacing="0" cellpadding="4" |Super high Strength FeCo30 2.0mm thick only |align = "center"|1.35"+0.005 & -0.02". |- |Veeco High strength |align = "center"|1.3"+0.005" & -0.02" |- |Angstrom High Strength |align = "center"|1.3"+0.005" & -0.02" |- | Veeco Low Strength |align = "center"|0.8"+0.05" & -0.05" |}
        1. Check Magnet Array Rotation.
          1. First check rotation without power by hand only.
          2. Then connect power cable and rotate to check rotation feedback and no noise from motor cogging.
        || ||

        CTI Cryo Trouble Shooting

        Cryo Temperature Rises 20K Above Set Point

        1. Close Hi-vac & observe array temperature
        2. If temp chills to set point, chamber may have leak which need to leak check.
        3. Temperature stays out of set points.
          1. First check compressor He static pressure charge if lower than 240psi static
          2. If He pressure is OK start Cryo regeneration.
          3. After cryo warm up leak check the cryo. If there is leak fix the leak otherwise continue with cryo regeneration.
          4. If cryo does not chill down to set point check cryo hours.
          5. If cryo is over 32000 hours change the cryo

        Cryo Making Noise

        1. Regenerate cryo and monitor.
        2. If the same noise comes back within a week the cryo need to be replaced.
        3. During the cryo replacement, disconnect the He line before warming up the cryo so that possible contaminated He can be removed.

        Cryo Regeneration Parameter

        {|class="wikitable" border="1" cellpadding="2" cellspacing="2" !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Cryo Type !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Ext. Purge Time !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Base Pressure !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|ROR !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Re-purge Time !style="font-size: 11pt ; text-align: center;color: white; background-color: #5CC1E6;"|Re-purge Cycle |- |align = "center"|TM||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |- |align = "center"|LLs||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |- |align = "center"|6GMR ||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |- |align = "center"|10GMR||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |- |align = "center"|ADD001 IMT||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |- |align = "center"|SPVD Dep ||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |- |align = "center"|SPVD Etch||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |- |align = "center"|PVDi Cr||align = "center"|60||align = "center"|50 u||align = "center"|10||align = "center"|5||align = "center"|20 |}

        PVD Target Configuration, Magnet Array Type, KwHr Setting, & Thickness Table

        {|border="0" cellspacing="2" width="100%" | || ||'''Refer to: '''WebTRS. |}

        Year PM Lead Screw Needle Bearing Grease Procedures

        1. Turn off CB located on process module cabinet for J-arm rotation & Lift controller, CB ## & CB##.
        2. Use crescent wrench to turn lead screw all the way down.
        3. Just loosen 6 screws of the lift motor assembly so that drive belt tension can be relaxed
        4. Remove 4 screws that hold lead screw needle valve housing.
        5. Rotate the lead screw by hand to lower the position.
        6. Remove collar at the top end of lead screw so that locking pins can be removed.
        7. The whole housing can be removed by sliding up the lead screw shaft.
        8. Remove old grease of needle bearing with IPA.
        9. Dry IPA and reapply grease.
        10. Reassembly the needle valve and install back on the lead screw.
        11. Rotating to leas screw to height where 4 screws can be installed.
        12. After installing the housing lower the lead screw to make sure needle bearing is pressure, not separated between top & bottom races.
        13. Place drive belt with even tension on both side onto pulley.
        14. Pull the lift motor assembly to put tension on the belt
        15. Tighten 6 screws and check belt tension is even.
        16. Power up the CB## & CB##.
        17. Reinitialize the J-arm. There should be no noise while J-arm is homing. It there is whole process need to be redone.

        SPVD Shutter Open/Close Error Recovery Procedure

        The shutter alarm cannot be reset and release to manufacturing. Following procedure of trouble shooting has to be completed.
        1. At initial shutter open/close alarm, lot that is running should be aborted without returning wafer to cassette before starting to work on tool.
        2. Without recovering alarm open the casing of shutter actuator located at the back end of shutter housing.
        3. There is rod with hard stop adjustment for shutter open/close. If the hard stop is not made on either opened or closed, chamber should be vented to perform bearing & guide shaft replacement per MMM52132 Section 5.1.2 "PVD Shutter Rail & Bearing Replacement Procedure". After replacement is completed go to step 5.
        4. If hard stop is stopped at correct position do not yet vent chamber. Check for sensor malfunction. Return production wafer back to cassette and test cycle using sequence named "Shutter Test". If tool alarm for shutter position error go to step 3.
        5. Pump down and test cycle using sequence named "Shutter Test" with shutter actuator casing opened. If there is alarm go to step 3. Otherwise start chamber conditioning.
        6. Return tool to manufacturing for calibration.

        Main Process Cooling Water (PCW) Filter Change Procedure

        With Bypass Valve

        1. Obtain new filter from stock, strap wrench and bucket.
        2. Verify tool is idle.
        3. Log all current PCW flows and pressures at the flow meters and pressure gauges.
        4. Verify all PCW cooled components are working properly, no faults or loss of power.
        5. Open the main PCW filter bypass valve.
        6. Close the filter inlet valve, and then close the filter outlet valve.
        7. Check to insure the PCW flows are the same or above the previous flows.
        8. Hang the bucket under the filter.
        9. While one person supports the PCW lines, the other uses the strap wrench to carefully loosen the filter housing, then by hand unscrew the housing slowly until fully removed.
        10. Remove the used filter, clean the housing and o-ring, expecting to make sure there are no cracks or tares, replace as needed.
        11. Place the new filter in the housing and then reattach hand tight.
        12. Slowly open the filter housing outlet valve, and then slowly open the filter inlet valve.
        13. Close the main PCW filter bypass valve and inspect housing to insure there are no leaks.
        14. Check to insure the PCW flows and pressures are the same as previously logged.
        15. Verify all PCW cooled components are working properly, with no faults or loss of power.

        Without Bypass Valve

        1. Obtain new filter from stock, strap wrench and bucket.
        2. Verify tool is idle.
        3. Log all current PCW flows and pressures at the flow meters and pressure gauges.
        4. Shut down / off all PCW cooled components.
        5. Close the filter inlet valve, and then close the filter outlet valve.
        6. Check to insure the PCW flows are the same or above the previous flows.
        7. Hang the bucket under the filter.
        8. While one person supports the PCW lines, the other uses the strap wrench to carefully loosen the filter housing, then by hand unscrew the housing slowly until fully removed.
        9. Remove the used filter, clean the housing and o-ring, expecting to make sure there are no cracks or tares, replace as needed.
        10. Place the new filter in the housing and then reattach hand tight.
        11. Slowly open the filter housing outlet valve, and then slowly open the filter inlet valve. Inspect to insure there are no leaks.
        12. Check to insure the PCW flows and pressures are the same as previously logged.
        13. Turn on and bring up all PCW cooled components and verify all are working properly.
        ===Alignment procedures===

        Yaskawa Shutter Position Recovery Procedure

        The Chamber must be vented to insure the shutter is aligned properly and complete this task.'''
        1. Go to the "shuttertest" screen (Yaskawa Maintenance screen) on the Techware from the "Operate Subsystem".
        2. Set the channel 3YKW.Command1 to ABSPGRES.
        3. Set the channel 3YKW.Command1 to RES.
        4. Reset the alarms by setting 3YKW.Command1 to ARES.
        5. Move the shutter opening to station 1 position by hand. The 3ykw.command1 should be SVOFF.
        6. Turn on the servo drive by setting 3YKW.Command1 to SVON.
          1. Set 3YKW.Command2 to POSA.
          2. Set 3YKW.TgtPosSp to 0.
          3. 3YKW.Command2 to ZSET.
        7. Try move to all 6 stations through Techware TI screen make sure all stations line up with shutter opening.
        ===Calibration=== [[Image:52132-AE(English)_205.png|framed|none]]

        VAT Valve Calibration Procedure

        |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/VAT_Valve_Calibration_Procedure.doc|VAT Valve Calibration Procedure ]] ===Special components=== N/A ===Stage=== N/A ===Other=== N/a ---- ==Document Support== ===History === {|border="2" cellspacing="0" cellpadding="4" width="89%" |align = "center"|'''Release Level'''||align = "center"|'''Date In Production'''||align = "center"|'''Change Description and/or Reference CCS Document #'''||align = "center"|'''Person Making Change ''' |- |align = "center"|A||align = "center"|06/10/03||align = "center"|New release, MMM Form #001932201||align = "center"|G. Uderitz |- |align = "center"|B||align = "center"|12/08/03||align = "center"|Author change to Reg Wills & 6 month review.
        MMM Form #002100001||align = "center"|G. Uderitz |- |align = "center"|C||align = "center"|03/12/04||align = "center"|Updated PM check list, MMM Form #002174201||align = "center"|R.Wills |- |align = "center"|D||align = "center"|09/22/04||align = "center"|Updated Power up tool, PM schedules, and GMR.
        MMM Form #002331901||align = "center"|R. Wills |- |align = "center"|E||align = "center"|03/16/05||align = "center"|Remove IBM references, update emergency phone #s, removed reference to OLD shutter in GMR checklist, and added clean Umbilical tray with IPA MMM Form #002480901
        Slider/Fab BCN Form #002198001 Change MMM review period from 6 months to 12 months and change PDF files back to word files. (Global Change 01/28/05) ||align = "center"|R. Wills


        M. Richert
        |- |align = "center"|F||align = "center"|03/09/06||align = "center"|12 month review, update with new gas bottle change procedure, add new MPI #s for operators removing Sensor, adding laminate & seed and changes to PM checklist for target PVD chamber.
        MMM Form #002774601
        Bulletin Form #002772001 add MSDS link under 1.4.1 (03/01/06)||align = "center"|R. Wills



        D. Pletzer |- |align = "center"|G||align = "center"|04/18/06||align = "center"|Update section 3.2 with startup and shutdown procedures and section 4.3 with IBDS checklist revised, MMM Form #002796301
        MPI Form #002796301 add MSDS link to section 1.4.1
        Global Change (04/18/06)||align = "center"|R. Wills


        D. Pletzer |- |align = "center"| ||align = "center"| ||align = "center"| ||align = "center"|  |- |align = "center"|H||align = "center"|04/19/07||align = "center"|12 month review, change owner from Reg Wills to Theodore Yong, no other changes. CAN Form #003130101||align = "center"|T. Yong |- |align = "center"|I||align = "center"|5/14/08||align = "center"|12 Month review, Section 4.3.1 covering IBDS module removed whole content and refer any work related to the IBFS module to MMM232231. MMM Form #003467801||align = "center"|T. Yong |- |align = "center"|J||align = "center"|04/27/2009||12 month review
        Updated
        Section 4.1.1 SPVD/Etch PM
        Section 4.2.1 GMR PM
        Addition of section
        5.1.28 Gas Bottle Change Procedure
        5.1.29 Target Tracking Procedure
        5.1.30 Magnet Array Height Measurement Procedure
        5.1.31 Target Change Log
        5.1.32 PVD Target Configuration & KwHr Setting & Thickness Table/MMM Form# 003864201

        Change DCC Dept# to Z34A||align = "center"|T Yong











        M. Richert |- |align = "center"|K||align = "center"|5/27/09||5.1.32 PVD Target Configuration & KwHr setting & Thickness Table is updated/MMM Form #003912501||align = "center"|Ted Yong |- |align = "center"|L||align = "center"|09/08/2009||Updated 4.1.1 , 4.2.1 &
        5.1.32 PD Target configuration, Magnet array type, KwHr setting, and thickness table has been updated/MMM Form #004044002||align = "center"|Ted Yong |- |align = "center"|M||align = "center"|11/04/2009||12 month review, updated 5.1.29 The target tracking Table is removed, updated Target Tracking Procedure available in target room. 5.1.32 The target configuration table is removed from the MMM. New location to find target configuration is designated./MMM form #004132302||align = "center"|Ted Yong |- |align = "center"|N||align = "center"|12/14/2009||12 month review, 4.2.1 GMR PM check list updated/MMM Form #004181902||align = "center"|Ted Yong |- |align = "center"|O||align = "center"|05/21/2010||12 Month review. 4.1.1 & 4.1.2 PM Check list updated. Added Appendix E with Training criteria & Certification Test. 5.2 Alignment procedure has new Yaskawa Shutter position recovery procedure/MMM form# 004396001
        Change dept#s to HGST new Dept#s||align = "center"|T. Yong



        M. Richert |- |align = "center"|P||align = "center"|07/28/2010||Reviewed, added Randy Sanchez as Co Author/MMM form# 004507901||align = "center"|T. Yong |- |align = "center"|Q||align = "center"|12/01/2010||New Items: 4.1.5 Annual & 5 Year PM Check list, 5.1.31 New Target Change Log, 5.1.33 5 year PM lead screw needle bearing grease procedure, 5.1.34 SPVD Shutter open/close error recovery procedure/MMM form #004699601||align = "center"|T. Yong |- |align = "center"|R||align = "center"|5/19/2011||4.1.1 4.1.2, and 4.1.3 PM check list removed. New PM check list inserted in Appendix A
        5.1.31 Target change log removed and inserted new CTC Cryo trouble shooting/MMM form#004968001||align = "center"|T Yong |- |align = "center"|S||align = "center"|01/09/2012||Reviewed and change of ownership to J. Raya/CAN form#005377301||align = "center"|B. Cruz |- |align = "center"|T||align = "center"|01/20/2012||12 month review, updated # Embed 6GMR PM Target Change Checklist. # Embed SPVD Etch PM Checklist # Embed SPVD Deposition PM Target Change Checklist # Removed Ted Yong’s name from the MMM and Checklist./MMM form#005418401
        Changed DCC Dept# to 400015||align = "center"|J. Raya




        M. Richert |- |align = "center"|U||align = "center"|02/02/2012||Updated checklists/MMM form#005431701
        Changed DCC Dept# 400015||align = "center"|J. Raya
        M. Richert |- |align = "center"|V||align = "center"|02/29/2012||PVD PM checklist for Full S&C- target Change, Target Change only, vent pump only, weekly computer rebootPM, daily KEPCO PS check, and gas bottle change/MMM form#005457401||align = "center"|J. Raya |- |align = "center"|W||align = "center"|05/03/2012||Updated Traget Change Cheklist and Target Change Only Checklist and VAT Valve Teach Procedure/MMM form#005583901
        Change DCC Dept# to 400022 and updated Hitachi to HGST Name||align = "center"|J. Raya

        M. Richert |- |align = "center"|X||align = "center"|01/31/2013||Updated references to new PM checklist for strip & clean and target change and new checklist also includes venting and evacuation activities along with changes to target removal criteria based on physical erosion, per MMM Form# 005950001
        Sec. 1.2.3 added Remote Access Warning and 1.4.1 update MSDS Link.||align = "center"|R. Schwaninger



        N. O’Brien |- |align = "center"|Y||align = "center"|5/10/2013||Added procedure for resetting OCS recipe status, updated reference to TRS location per MMM Form# 006191201.
        Updated DCC Dept.# to 400006||align = "center"|R. Schwaninger

        N. O’Brien |- |align = "center"|Z||align = "center"|08/02/2013||Added the required cryo regens in the alarm Sec. 3.3, Created sub-categories to Chapter 4, relocated the PM checklists from App. A to Sec. 4.1.1, Added the PM shield kit BOM’s to Sec. 4.1.2 and removed IBDS from MMM with the exception of verbiage that redirects to the proper MMM per MMM Form# 006294001.||align = "center"|J. Raya |- |align = "center"|AA||align = "center"|09/26/2013||Updates to required RoR procedures and practices. Specific updated information includes: Identification of all tools to which this MMM applies, Removal of references to IBD tools, Addition of monthly checklist - Addition of alarm procedures, Addition of RoR procedures and specifications, Corrections to certification test questions and Added emphasis on checks and verification for chamber conditions before closing per MMM Form# 006384901.||align = "center"|R.Schwaninger |- |align = "center"|AB||align = "center"|10/17/2013||Clarified cryo regeneration guidelines in monthly checklists. Clarified requirement to perform etch SPVD S/C at the same time as Dep SPVD S/C (every 3rd target change). Added reset Techware and CTC at monthly PM, and added the requirement to run TESBURNALL after teaching the VAT valve per MMM Form# 006409001.||align = "center"|R. Schwaninger |- |align = "center"|AC||align = "center"|4/28/2014||SPVD etch chamber S/C frequency clarified (every three months and scheduled in MESA)
        -Correction of some Cryo regneration paramteres (xtended purge time, base pressure, RoR specification)
        -Added cylinder ID in for gas bottle change
        -Clarified steps in removing gas bottle from manifold
        -Added inspection of valve and seal
        -Added specific instructions on gas line pumpdown
        -Added delivery pressure specification
        -Added specification for magnet to backing plate clearance (1 mm)
        ||align = "center"|R. Schwaninger |- |align = "center"|AD||align = "center"|10/12/2014||Added reference to Local Practices for Safety.
        Added Testburnall as a requirement after cryopump regeneration.
        Removed superfluous document revision verifications on Checklists
        Added references to change gas bottles at 250 psig. Per MMM Form# 006843401.||align = "center"|R. Schwaninger |- |align = "center"|AE||align = "center"|05/29/2015||Added process gasses to chemical list. Added Target materials.
        Added MESA ID/License plate verification
        Added PM table
        Added Magnet Swap checklist.
        Added references to pertinent MPIs
        Added minimum gas bottle pressure before replacment
        Added requirement to leak check the MFC after a gas bottle change.
        Added the requirement for blank off flanges to be present on leak check ports and that they be burped (checklist additions)
        Added shielding inspection criteria for SPVD modules (checklist addition).
        Added Techware reset to monthly PM checklist….See blue text per MMM Form# 007224901.||align = "center"|R. Schwaninger |} ===Distribution=== {|border="2" cellspacing="0" cellpadding="4" width="100%" |align = "center" bgcolor = "#00FFFF"|'''User(s)'''||align = "center" bgcolor = "#00FFFF"|'''Dept'''||align = "center" bgcolor = "#00FFFF"|'''Dept Location'''||align = "center" bgcolor = "#00FFFF"|'''Type of Copy'''||align = "center" bgcolor = "#00FFFF"|'''Location Of Document''' |- |align = "center"|MFG||align = "center"|400044||align = "center"|006||align = "center"|Soft||align = "center"|Y:\MMM and on the Wafer DCS Repository |- |align = "center"|DCC||align = "center"|400006||align = "center"|14-2||align = "center"|Soft||align = "center"|Wafer Repository |- |align = "center"|DCC||align = "center"|400006||align = "center"|14-2||align = "center"|Soft||align = "center"|Wafer backup system |- |align = "center"|MFG / Maint. / Eng.||align = "center"|Al under BC0001||align = "center"|San Jose||align = "center"|Soft||align = "center"|Wafer Repository |} ---- ==Machine and Software Specifications== Refer to body of OEM maintenance manual. CTC Computer: CPU: Intel Core 2 Quad Q84 @ 2.66GHz, HD: 230GB, Adaptec: Raid 2 SCSI, RAM: 3GB, Floppy: Standard, CD-ROM: AD-7280S, Windows: 2000 SP4 Techware Computer: OS9 Software ==Vendor Information== NA ==Parts List== {|border="0" cellspacing="2" width="100%" |'''Link to PVD Spare Parts BOM (from SAP):||[file://\\wafapps\deptdata\Equip_Team\Maintenance\Vacuum_Tools\PVD_Spare_Parts_8.22.13.XLS X:\Equip Team\Maintenance\Vacuum Tools\PVD Spare Parts 8.22.13.XLS]''' |} Abrasives {|border="0" cellspacing="2" width="100%" |--- Coarse ||9655408 |- |--- Medium ||9655409 |- |--- Fine ||9655410 |} '''SINGLE TARGET PVD''' {|border="0" cellspacing="2" width="100%" |Shutter Blade ||03025290000 |- |Lower shield ||03033120000 |- |Middle shield ||03057750000 |- |Shutter shield ||03064540000 |- |Anode ring ||03048550000 |- |Table pins ||030311381000 |} ---- '''GMR PARTS''' {|border="0" cellspacing="2" width="100%" |Chamber Liner ||03115710000 |- |Shutter Blade, no hole ||03128300001 |- |Shutter blade with hole ||03126300002 |- |Outer table adapter ||03149530000 |- |Front table Segment ||03149550000 |- |Inside table segment ||03149560000 |- |Anode ring ||03069320000 |} ==Troubleshooting== '''Common Troubleshooting Techniques for the CTC''' '''1. Cassette Module Does Not Vent''' The cassette module can be vented from the CTC or the module controller interface. Venting using the cassette module controller interface is done by stopping the current program and running the vent program or by manually changing the valve states. '''2. Module Controller Vent Program fails.''' '''Symptom:''' cassette does not vent using batch program. # Select trace from main module controller screen. # Select trace a program and select the vent.cm batch. # The program will be stopped waiting for a hardware event, e.g pressure < 75 mTorr. # This event indicates the hardware error, e.g. pressure gauge fail or pump not working. '''3. Manual Vent Fails''' '''Symptom''': Hardware fails to respond to module controller action. # Go to I/O board corresponding to hardware channel and toggle state here. # If hardware does not respond check board wiring and output. # Check hardware status. '''4. CTC Cassette Vent Fails''' '''Symptom''': Cassette module does not start vent when vent selected from cassette handoff. # Check cassette/CTC connectivity IO points # 5. Cassette/CTC Connectivity '''Check''', 0). # Check cassette response to vent request (6. Cassette Vent Activation Check, 0). {|border="0" cellspacing="2" width="100%" | # Trace cassette vent program.||  |} '''5. Cassette/CTC Connectivity Check''' # Select the CTC main screen. # Select the IO points page CMn Points, where n is 1 or 2. # Ensure that all the points, CM1.TM1.HO, CM1.TM1.HO, CM1.IO, CM1.AL, CM1.COMM are connected. '''6. Cassette Vent Activation Check''' # Select the transport/cassette module controller from the module controller interface (Ctrl D 0 then Ctrl V) # Select the operation subsystem and then select the tmc screen. # When the vent button on the CTC is pressed, the MCxxxxxx functions are activated starting with MCReady. A task indicates it is activated by showing the status of Running rather than Ok or success. # If no MC tasks are activated, reboot the machine and retry the vent watching the MC tasks on the tmc screen. # If a task is shown as Running, go to the trace system and trace the task that is running. This should indicate that the task or a sub-task is stopped, trace not changing lines, at a particular event. # If no MC tasks are running check the cassette connectivity ( # 5. Cassette/CTC Connectivity '''Check''', 0). '''EMO Recovery Procedure''' If an EMO button is activated the user has about three minutes to restore power to the tool. Failure to restore the power can cause the second stage temperature on the cryo pumps to rise above twenty-five degrees Kelvin. If this happens perform a regeneration on the affected pump(s). Also, the CTC and TM module controller computers as well as CTC monitor will remain energized for about five minutes due to power provided by the tool’s uninterruptible power supply. If an EMO button is activated perform the following steps to recover: # Release the affected EMO mushroom button by turning it counter clockwise. '''Caution: Check the robot arms’ position prior to proceeding. Failure to do so can cause damage to the robot’s''' '''arms and /or effector. If they are extended into a process module, perform the following, if not, proceed to step 2.''' # Manually turn off all CVC module controller computers. This is done by using the power on and off switch located in the rear of each computer. # Turn on the tool’s main power supply by pushing in the main power button located on the main distribution box. # Once the main power is restored to the tool, turn on the TM module controller computer. # Wait until the arms are clear of the process module, then manually turn on all the process module CVC module controller computers and proceed to step 3 of this procedure. # Turn on the tool’s main power supply by pushing in the main power button located on the main distribution box. '''Note: Some tools have been modified so that the main power button is located on the side of the CWH.''' # Turn on the roughing pump power supply by pushing in the roughing pump power button located on the main distribution box. '''Note: Some roughing pumps have an independent EMO button that must be reset in order to activate the''' '''roughing pump.''' # Once all CVC module computers have reset themselves, log into each computer and check the second stage temperature of each cryo pump. If the second stage temperature is above 25( K perform a regeneration on that pump or ensure that regeneration has started automatically. '''Note: The above can also be done by using the CTI network controller.''' # Reset the tool. (see: System Reset Procedure) ==Training & Certification== {| |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/PVD_ADD_Training_Certification.doc|PVD ADD Training Certification.doc]] |[[Image:Checklist2.PNG|thumb|70px|link={{SERVER}}/docs_add/docs_hgst/ADD_PVD_Certification_Test.doc|ADD PVD Certification Test.doc]] |} ==End of Document==